Abstract: RF power supply is an important component in RF-CO₂ laser. During the development of a new RF-CO₂ laser, due to the mismatch between the laser load and the RF power supply, the power tube of the RF power amplifier is easy to break down and burn out in the debugging process. In order to solve this problem, a RF power supply monitoring platform for RF-CO₂ laser, which integrated data acquisition, automatic protection control and visualization technology, was designed. The platform adopted a combination of software and hardware, a control module was embedded in the RF power supply, a data acquisition system and automatic protection system were set up, and combined with the circuit design software platform, the RF power supply data acquisition and protection control was completed. The experimental test shows that the platform can effectively avoid the damage of the power tube of the RF power supply, realize the automatic protection of the RF power supply, complete the data acquisition and remote protection control of the RF power supply system, shorten the debugging period of the RF-CO₂ laser, and improve the development efficiency of the whole machine.