子孔径拼接和计算全息混合补偿检测大口径凸非球面(特邀)

苏航; 王孝坤; 程强; 李凌众; 王晶; 李雯研; 吴琼; 唐瓦; 罗霄; 张学军

doi:10.3788/IRLA20220576

子孔径拼接和计算全息混合补偿检测大口径凸非球面(特邀)

Sub-aperture stiching and CGH mixed compensation for the testing of large convex asphere (invited)

摘要

摘要: 为了实现大口径凸非球面的高精度检测，提出了将子孔径拼接检测法和计算全息补偿检测法相结合的检测方法。由于其中心的非球面度较小，采用球面波直接检测；而外圈的非球面度较大，采用子孔径拼接和计算全息混合补偿的方法进行测量，再通过拼接算法将中心检测数据和外圈检测数据进行拼接从而得到全口径面形。结合实例对一块口径为540 mm的大口径凸非球面进行测量，并将检测结果与Luphoscan 检测结果进行对比，两种方法检测面形残差的RMS值为0.019λ，自检验子孔径与拼接结果点对点相减后的RMS值为0.017λ。结果表明该方法能够实现大口径凸非球面的高精度检测。

Abstract: In order to achieve high-precision testing of large convex asphere, a testing method combining sub-aperture stitching and computer generated hologram compensation is proposed. Because the asphericity of the center is small, the direct testing method of spherical wave is used; while the asphericity of the outer ring is large, the method of sub-aperture stitching and computer generated hologram (CGH) mixed compensation is used for measurement. Then, the center testing data and the outer ring testing data are stitched by the stitching algorithm to obtain the full-aperture surface shape. Combined with an example, a large convex asphere with a diameter of 540 mm is measured. The test results were compared with the Luphoscan testing results. The residual error of the two methods to test the RMS value of the surface is 0.019λ, and RMS value after subtracting the self-test aperture and stitching result point-to-point is 0.017λ. The results show that the method can achieve high-precision testing of large convex asphere.

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