金巨鹏, 刘丹, 王建新, 吴云, 曹菊英, 曹妩媚, 林春. 320×256 GaAs/AlGaAs长波红外量子阱焦平面探测器[J]. 红外与激光工程, 2012, 41(4): 833-837.
引用本文: 金巨鹏, 刘丹, 王建新, 吴云, 曹菊英, 曹妩媚, 林春. 320×256 GaAs/AlGaAs长波红外量子阱焦平面探测器[J]. 红外与激光工程, 2012, 41(4): 833-837.
Jin Jupeng, Liu Dan, Wang Jianxin, Wu Yun, Cao Juying, Cao Wumei, Lin Chun. 320×256 GaAs/AlGaAs long-wavelength quantum well infrared photodetector focal plane array[J]. Infrared and Laser Engineering, 2012, 41(4): 833-837.
Citation: Jin Jupeng, Liu Dan, Wang Jianxin, Wu Yun, Cao Juying, Cao Wumei, Lin Chun. 320×256 GaAs/AlGaAs long-wavelength quantum well infrared photodetector focal plane array[J]. Infrared and Laser Engineering, 2012, 41(4): 833-837.

320×256 GaAs/AlGaAs长波红外量子阱焦平面探测器

320×256 GaAs/AlGaAs long-wavelength quantum well infrared photodetector focal plane array

  • 摘要: 量子阱红外探测器(Quantum well infrared photodetector, QWIP)已经经历了20多年的深入研究,各种QWIP器件,包括量子阱红外探测器焦平面阵列(FPA)的研制也已经相当成熟。但是在国内,受制于整体工业水平, QWIP焦平面阵列器件的研制仍然处于起步阶段。研制了基于GaAs/ AlxGa1-xAs 材料、峰值响应波长为9.9 m的长波320256 n型QWIP焦平面阵列器件,其像元中心距25 m, 光敏元面积为22 m22 m。GaAs衬底减薄后的QWIP焦平面阵列,与Si基CMOS读出电路(ROIC)通过铟柱倒焊互连,并且在65 K工作温度下进行了室温环境目标成像。该焦平面器件的规模和成像质量相比之前国内报道的结果都有较大提高。焦平面平均峰值探测率达1.51010 cmHz1/2/W。

     

    Abstract: Quantum well infrared photodetector(QWIP) has been comprehensively and thoroughly studied for more than 20 years. The research and preparation of many kinds of QWIP devices including QWIP focal plane array(FPA) become quite mature. However, restrained by the whole domestic industrial development level, the research and fabrication of QWIP FPAs is still on relatively low level in home. We fabricated 320256 n-type QWIP FPA based on GaAs/ AlxGa1-xAs. The cutoff wavelength was 9.9 m, mesa center distance was 25 m and active sensitive area was 22 m22 m. After GaAs-substrate thinning, the QWIP FPA was flip-chip bonded to a silicon based CMOS read out integrated circuit(ROIC) by indium bump. Infrared images of targets at room temperature background were taken at 65 K operating temperature. The scale of the FPA and the quality of images were improved comparing with the former interior result. The mean peak detectivity of the FPA reached 1.51010 cmHz1/2/W.

     

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