高陡度保形光学非球面环形子孔径检测方法

王洪浩; 明名; 吕天宇; 邹惠莹

doi:10.3788/IRLA201645.0417001

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高陡度保形光学非球面环形子孔径检测方法

王洪浩, 明名, 吕天宇, 邹惠莹

文章导航 > 红外与激光工程 > 2016 > 45(4): 417001-0417001(7)

王洪浩, 明名, 吕天宇, 邹惠莹. 高陡度保形光学非球面环形子孔径检测方法[J]. 红外与激光工程, 2016, 45(4): 417001-0417001(7). doi: 10.3788/IRLA201645.0417001

引用本文:

王洪浩, 明名, 吕天宇, 邹惠莹. 高陡度保形光学非球面环形子孔径检测方法[J]. 红外与激光工程, 2016, 45(4): 417001-0417001(7). doi: 10.3788/IRLA201645.0417001

Wang Honghao, Ming Ming, Lv Tianyu, Zou Huiying. Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching[J]. Infrared and Laser Engineering, 2016, 45(4): 417001-0417001(7). doi: 10.3788/IRLA201645.0417001

Citation:

Wang Honghao, Ming Ming, Lv Tianyu, Zou Huiying. Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching[J]. Infrared and Laser Engineering, 2016, 45(4): 417001-0417001(7). doi: 10.3788/IRLA201645.0417001

高陡度保形光学非球面环形子孔径检测方法

doi: 10.3788/IRLA201645.0417001

1.
中国科学院长春光学精密机械与物理研究所,吉林长春 130033;
2.
长春师凯科技产业有限责任公司,吉林长春 130033

详细信息

作者简介:
王洪浩(1990-),男,助理研究员,硕士,主要从事大型光机结构装调与检测等方面的研究。Email:whh_hit@163.com

中图分类号: TH706

Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching

1.
Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;
2.
Changchun Shikai Science and Technology Industry Co.,LTD,Changchun 130033,China

摘要: 环形子孔径拼接技术检测大口径、高陡度光学非球面具有低成本、高效率的特点。提出一种基于最小二乘法和泽尼克多项式拟合的环形子孔径拼接方法检测高陡度光学非球面。研究了环形子孔径拼接算法的基本原理,对环形子孔径的划分方式进行数学公式推导及参数运算,建立被测非球面的有效数学模型。全口径的拼接结果与原始波面基本一致,二者PV和RMS差值分别为0.015 1、0.004 7(为632.8 nm),残差的PV和RMS值为0.043 5、0.005 2,验证该算法的有效性和准确性。
- 高陡度 /
- 高精度检测 /
- 环形子孔径拼接 /
- 拼接算法
Abstract: Annular sub-aperture stitching interferometry technology can test steep conformal aspheric surfaces with low cost and high efficiency without auxiliary null optics. The effective splicing algorithm was established based on simultaneous least-squares method and Zernike polynomial fitting. Firstly, the basic principle of the algorithm of the annular sub-aperture stitching was studied. Secondly, the mathematical formulas of the sub-aperture effective area were derived and the parameters of the sub-aperture effective area were calculated and optimized. Finally, the reasonable mathematical model was established. The detection method of annular sub-aperture stitching high steepness aspheric has been tested through on experimental verification. As a result, the surface map of the full aperture after stitching was consistent to the input surface map, the difference of PV error and RMS error between them is 0.015 1 and 0.004 7( is 632.8 nm); the PV and RMS of residual error of full aperture phase distribution is 0.043 5 and 0.005 2. The results conclude that this splicing model and algorithm were accurate and feasible.
- high-gradient /
- high-precision testing /
- annular sub-aperture stitching /
- stitching algorithm

[1]	Zhang Pengfei, Zhao Hong, Liu Bincai, et al. Simple method for the implementation of subaperture stitching interferometry[J]. Optical Engineering, 2011, 50(9):35-36.(in Chinese)
[2]	Lin P C, Chen Y C, Lee C M, et al. A subaperture stitching algorithm for aspheric surfaces[C]//SPIE, 2011, 5(14):15-17.
[3]	Zhao Wenzhe, Qin Shiyin. Multiply kernels matching for precise television guidance[J]. Optical Engineering, 2011, 50(8):1-3. (in Chinese)
[4]	Liang C W, Chen Y A, Lee C C. The off-axis alignment of an asphere by a Fizeau interferomete[C]//SPIE, 2011, 4(7):83-84.
[5]	W Lyda. Automated multiscale measurement system for MEMS characterization[C]//SPIE, 2010, 38(3):77-78.
[6]	Chen S, Liao W, Dai Y, et al. Self-calibrated sub-aperture stitching test of hyper-hemispheres using latitude and longitude coordinates[J]. Appl Opt, 2012, 51(33):17-25.
[7]	Lin Po-Chih, ChenYi-Chun, Lee Chung-Min, et al. A subaperture stitching algorithm for aspheric surfaces[C]//SPIE, 2011, 8082:80821G-1.

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高陡度保形光学非球面环形子孔径检测方法

doi: 10.3788/IRLA201645.0417001

1. 中国科学院长春光学精密机械与物理研究所,吉林长春 130033;

2. 长春师凯科技产业有限责任公司,吉林长春 130033

作者简介:
王洪浩(1990-),男,助理研究员,硕士,主要从事大型光机结构装调与检测等方面的研究。Email:whh_hit@163.com

收稿日期: 2015-07-24
修回日期: 2015-08-27
刊出日期: 2016-04-25

中图分类号: TH706

关键词:

摘要: 环形子孔径拼接技术检测大口径、高陡度光学非球面具有低成本、高效率的特点。提出一种基于最小二乘法和泽尼克多项式拟合的环形子孔径拼接方法检测高陡度光学非球面。研究了环形子孔径拼接算法的基本原理,对环形子孔径的划分方式进行数学公式推导及参数运算,建立被测非球面的有效数学模型。全口径的拼接结果与原始波面基本一致,二者PV和RMS差值分别为0.015 1、0.004 7(为632.8 nm),残差的PV和RMS值为0.043 5、0.005 2,验证该算法的有效性和准确性。

English Abstract

Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching

1. Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;

2. Changchun Shikai Science and Technology Industry Co.,LTD,Changchun 130033,China

Received Date: 2015-07-24
Rev Recd Date: 2015-08-27
Publish Date: 2016-04-25

Keywords:

Abstract: Annular sub-aperture stitching interferometry technology can test steep conformal aspheric surfaces with low cost and high efficiency without auxiliary null optics. The effective splicing algorithm was established based on simultaneous least-squares method and Zernike polynomial fitting. Firstly, the basic principle of the algorithm of the annular sub-aperture stitching was studied. Secondly, the mathematical formulas of the sub-aperture effective area were derived and the parameters of the sub-aperture effective area were calculated and optimized. Finally, the reasonable mathematical model was established. The detection method of annular sub-aperture stitching high steepness aspheric has been tested through on experimental verification. As a result, the surface map of the full aperture after stitching was consistent to the input surface map, the difference of PV error and RMS error between them is 0.015 1 and 0.004 7( is 632.8 nm); the PV and RMS of residual error of full aperture phase distribution is 0.043 5 and 0.005 2. The results conclude that this splicing model and algorithm were accurate and feasible.