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等离激元增强金硅肖特基结近红外光电探测器进展

王琦龙 李裕培 翟雨生 计吉焘 邹海洋 陈广甸

王琦龙, 李裕培, 翟雨生, 计吉焘, 邹海洋, 陈广甸. 等离激元增强金硅肖特基结近红外光电探测器进展[J]. 红外与激光工程, 2019, 48(2): 203002-0203002(14). doi: 10.3788/IRLA201948.0203002
引用本文: 王琦龙, 李裕培, 翟雨生, 计吉焘, 邹海洋, 陈广甸. 等离激元增强金硅肖特基结近红外光电探测器进展[J]. 红外与激光工程, 2019, 48(2): 203002-0203002(14). doi: 10.3788/IRLA201948.0203002
Wang Qilong, Li Yupei, Zhai Yusheng, Ji Jitao, Zou Haiyang, Chen Guangdian. Progress of surface plasmon enhanced near-infrared photodetector based on metal/Si Schottky heterojunction[J]. Infrared and Laser Engineering, 2019, 48(2): 203002-0203002(14). doi: 10.3788/IRLA201948.0203002
Citation: Wang Qilong, Li Yupei, Zhai Yusheng, Ji Jitao, Zou Haiyang, Chen Guangdian. Progress of surface plasmon enhanced near-infrared photodetector based on metal/Si Schottky heterojunction[J]. Infrared and Laser Engineering, 2019, 48(2): 203002-0203002(14). doi: 10.3788/IRLA201948.0203002

等离激元增强金硅肖特基结近红外光电探测器进展

doi: 10.3788/IRLA201948.0203002
基金项目: 

NSAF联合基金(U1730113);江苏省自然科学基金(BK20171365);111计划(B07027);中央高校基本科研业务费专项资金;江苏省研究生科研与实践创新计划(SJCX17_0020)

详细信息
    作者简介:

    王琦龙(1976-),男,教授,博士生导师,博士,主要从事微纳电子器件、光电系统设计与工程、真空光电器件方面的研究。Email:northrockwql@seu.edu.cn

  • 中图分类号: TN21

Progress of surface plasmon enhanced near-infrared photodetector based on metal/Si Schottky heterojunction

  • 摘要: 表面等离激元共振衰减诱导热电子,因其能量高、分布窄、打破半导体禁带宽度限制等特点被广泛应用于拓展半导体光电转换的响应光谱,如拓展宽禁带半导体的响应光谱至可见光波段,拓展硅的响应波段至近红外。此外,还可以通过调节表面等离激元结构调控响应光谱和实现偏振探测,在实现硅基近红外光电探测领域具有重要的应用价值。从表面等离激元以及表面等离激元内光电效应的机理出发,综述了表面等离激元热电子原理在实现硅基近红外光电探测方面的研究进展,并总结了表面等离激元结构的形貌,尺寸、分布等因素对热电子的产生(外量子效率)和注入效率(内量子效率)的影响。最后展望了基于表面等离激元结构的硅基肖特基结近红外光电探测的研究方向。
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出版历程
  • 收稿日期:  2018-09-05
  • 修回日期:  2018-10-12
  • 刊出日期:  2019-02-25

等离激元增强金硅肖特基结近红外光电探测器进展

doi: 10.3788/IRLA201948.0203002
    作者简介:

    王琦龙(1976-),男,教授,博士生导师,博士,主要从事微纳电子器件、光电系统设计与工程、真空光电器件方面的研究。Email:northrockwql@seu.edu.cn

基金项目:

NSAF联合基金(U1730113);江苏省自然科学基金(BK20171365);111计划(B07027);中央高校基本科研业务费专项资金;江苏省研究生科研与实践创新计划(SJCX17_0020)

  • 中图分类号: TN21

摘要: 表面等离激元共振衰减诱导热电子,因其能量高、分布窄、打破半导体禁带宽度限制等特点被广泛应用于拓展半导体光电转换的响应光谱,如拓展宽禁带半导体的响应光谱至可见光波段,拓展硅的响应波段至近红外。此外,还可以通过调节表面等离激元结构调控响应光谱和实现偏振探测,在实现硅基近红外光电探测领域具有重要的应用价值。从表面等离激元以及表面等离激元内光电效应的机理出发,综述了表面等离激元热电子原理在实现硅基近红外光电探测方面的研究进展,并总结了表面等离激元结构的形貌,尺寸、分布等因素对热电子的产生(外量子效率)和注入效率(内量子效率)的影响。最后展望了基于表面等离激元结构的硅基肖特基结近红外光电探测的研究方向。

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