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SW 2 k×2 k红外焦平面器件封装于动态杜瓦中进行相关性能测试,封装F数为4,测试条件为50%的势阱填充,将像元响应率超过平均响应率1/2的像元、像元噪声电压大于平均噪声电压2倍的像元判定为盲元,器件结果如表1所示。
表 1 器件结果
Table 1. Results of the device
Parameters Achieved Format 2 k×2 k(18 μm) Spectral 2.1-3.3 μm Operability >99.9% D* >4×1012 (cm·Hz1/2)/W NETD ≤30 mK Dark current <1 nA/cm2 Quantum efficiency >80% Non linearity <3% Operating temperature 80-110 K 昆明物理研究所制备的n-on-p器件和法国的n-on-p器件的有效像元率对比图如图13所示。在工作温度低于115 K时,昆明物理研究所的n-on-p器件有效像元率优于法国n-on-p器件[13],但当工作温度高于115 K后,昆明物理研究所的n-on-p器件有效像元率急剧下降,噪声盲元急剧增多。噪声盲元增多的原因可能是随工作温度的升高,受温度影响较大的热噪声、产生-复合噪声以及随机电报噪声随之增大,这些噪声机制主要依赖于材料与器件的制备工艺水平,因此,昆明物理研究所SW 2 k×2 k红外焦平面器件若需应用在高温,还需进一步优化材料及器件工艺,提高温度稳定性。
器件暗电流分布如图14所示,暗电流均匀分布,器件在80 K工作温度下暗电流均值在3 fA (0.9 nA/cm2)左右,器件R0A值约为7.45×106 Ω·cm2。根据光伏探测器背景限公式计算,当R0A大于2500 Ω·cm2时,器件接近背景限性能。
Study on large-area array SW HgCdTe infrared focal plane device
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摘要: 随着红外焦平面技术的发展,大面阵红外焦平面器件在遥感、气象、资源普查和高分辨对地观测卫星上得到了广泛应用。因此,基于第三代红外焦平面技术的超大规模焦平面器件成为国内外研究热点。文中介绍了昆明物理研究所采用n-on-p技术路线成功研制的短波(Short Wave, SW) 2 k×2 k(18 μm,像元中心距)碲镉汞红外焦平面器件。短波2 k×2 k碲镉汞红外焦平面器件突破了大尺寸碲锌镉(CdZnTe)衬底制备和大面积液相外延薄膜材料生长技术,衬底尺寸由Φ75 mm增加到Φ90 mm,获得了高度均匀的大面积碲镉汞(HgCdTe)薄膜材料。通过大面阵器件工艺、大面阵倒装互连等技术攻关,最终获得了有效像元率大于99.9%、平均峰值探测率(D*)大于4×1012 (cm·Hz1/2)/W、暗电流密度在1 nA/cm2的高性能短波2 k×2 k(18 μm)碲镉汞红外焦平面器件。Abstract: With the development of infrared focal plane technology, large-area infrared focal plane devices have been widely used in remote sensing, meteorology, resource surveys and high-resolution earth observation satellites. Therefore, based on the third-generation infrared focal plane technology ultra-large-scale focal plane devices are called research hotspots at home and abroad. The short wave (SW) 2 k (18 μm, pixel pitch) mercury cadmium telluride(MCT) infrared focal plane device was reported, which was successfully developed by Kunming Institute of Physics using n-on-p technology. The SW 2 k MCT infrared focal plane device has broken through the preparation of large-size cadmium zinc telluride (CdZnTe) substrates and the growth of large-area liquid phase epitaxy thin film materials. The substrate size was increased from Φ75 mm to Φ90 mm, and a highly uniform large-area Mercury Cadmium Telluride (HgCdTe) thin film material was obtained. By tackling key technologies such as large array device technology and large area array flip-chip interconnect, a high-performance SW 2 k×2 k (18 μm) MCT infrared focal plane device with an operability over 99.9%, average peak detection rate (D*) greater than 4×1012 (cm·Hz1/2)/W and dark current density of 1 nA/cm2 was finally obtained.
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Key words:
- short wave /
- large area array /
- 2 k /
- infrared focal plane device
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表 1 器件结果
Table 1. Results of the device
Parameters Achieved Format 2 k×2 k(18 μm) Spectral 2.1-3.3 μm Operability >99.9% D* >4×1012 (cm·Hz1/2)/W NETD ≤30 mK Dark current <1 nA/cm2 Quantum efficiency >80% Non linearity <3% Operating temperature 80-110 K -
[1] Chorier P, Tribolet P M, Fillon P, et al. Application needs and trade-offs for short-wave infrared detectors[C]//Infrared Technology and Applications XXIX. International Society for Optics and Photonics, 2003, 5074: 363-373. [2] Amico P, Beletic J W. Scientific Detectors for Astronomy: The Beginning of a New Era[M]. Holland: Kluwer Academic Publisher, 2004. [3] Beletic J W, Blank R, Gulbransen D, et al. Teledyne imaging sensors: Infrared imaging technologies for astronomy and civil space[C]//High Energy, Optical, and Infrared Detectors for Astronomy III. SPIE, 2008, 7021: 161-174. [4] Zandian M, Farris M, McLevige W, et al. Performance of science grade HgCdTe H4 RG-15 image sensors[C]//High Energy, Optical, and Infrared Detectors for Astronomy VII, 2016, 9915: 148-158. [5] Piquette E C, McLevige W, Auyeung J, et al. Progress in development of H4 RG-10 infrared focal plane arrays for WFIRST-AFTA[C]//High Energy, Optical, and Infrared Detectors for Astronomy VI. International Society for Optics and Photonics, 2014, 9154: 91542 H. [6] Finger G, Baker I, Downing M, et al. Development of HgCdTe large format MBE arrays and noise-free high speed MOVPE EAPD arrays for ground based NIR astronomy[C]//International Conference on Space Optics—ICSO 2014. International Society for Optics and Photonics, 2017, 10563: 1056311. [7] Starr B, Mears L, Fulk C. RVS large format arrays for astronomy[C]//High Energy, Optical, and Infrared Detectors for Astronomy VII, 2016, 9915: 929-942. [8] Acton D, Jack M, Sessler T. Large format short-wave infrared (SWIR) focal plane array (FPA) with extremely low noise and high dynamic range[C]//Infrared Technology and Applications XXXV. International Society for Optics and Photonics, 2009, 7298: 1273-1285. [9] Chorier P. Sofradir MCT technology for space applications[C]//Proceedings of SPIE, 2009, 7330: 46-57. [10] Fieque B, Chorier P, Lamoure A, et al. Status of space activity and science detectors development at Sofradir[C]//Proceedings of SPIE, 2018, 11180: 111803E. [11] Mollard L, Destefanis G, Baier N, et al. Planar p-on-n HgCdTe FPAs by arsenic ion implantation [J]. Journal of Electronic Materials, 2009, 38(8): 1805-1813. doi: 10.1007/s11664-009-0829-9 [12] 看!中国电科又成功研制出逆天神器[EB/OL]. (2018-01-10)[2022-01-29]. http://mil.news.sina.com.cn/2018-01-10/doc-ifyqptqv6869682.shtml. [13] Vuillermet M, Billon-Lanfrey D, Reibel Y, et al. Status of MCT focal plane arrays in France[C]//Infrared Technology and Applications XXXVIII. International Society for Optics and Photonics, 2012, 8353: 901-912.