夏利鹏, 刘昱恒, 周培基, 邹毅. 中红外集成光子传感系统研究进展(特邀)[J]. 红外与激光工程, 2022, 51(3): 20220104. DOI: 10.3788/IRLA20220104
引用本文: 夏利鹏, 刘昱恒, 周培基, 邹毅. 中红外集成光子传感系统研究进展(特邀)[J]. 红外与激光工程, 2022, 51(3): 20220104. DOI: 10.3788/IRLA20220104
Xia Lipeng, Liu Yuheng, Zhou Peiji, Zou Yi. Advances in mid-infrared integrated photonic sensing system (Invited)[J]. Infrared and Laser Engineering, 2022, 51(3): 20220104. DOI: 10.3788/IRLA20220104
Citation: Xia Lipeng, Liu Yuheng, Zhou Peiji, Zou Yi. Advances in mid-infrared integrated photonic sensing system (Invited)[J]. Infrared and Laser Engineering, 2022, 51(3): 20220104. DOI: 10.3788/IRLA20220104

中红外集成光子传感系统研究进展(特邀)

Advances in mid-infrared integrated photonic sensing system (Invited)

  • 摘要: 近年来,中红外(波长范围2~20 μm)集成光子学因其潜在的应用场景如吸收光谱、热成像、自由空间光通信等而受到了广泛的关注。中红外波段包含了多个大气透明窗口,有着作为气体传感应用的先天优势,并且得益于近红外成熟的器件设计测试流程与微纳加工技术,一些近红外的应用也能够较快地拓展至中红外波段。此外,集成光子器件在一些传感应用中不仅可以做到媲美传统设备的灵敏度,同时还具有低功耗、低成本、结构紧凑,易于与其他设备集成的特点。因此,中红外集成光子传感器件在未来将会在工业检测、科学研究、医疗诊断、军事安防、民用生活等领域中不断发挥出重要的作用。文中对中红外传感系统的三个主要部分:传感单元、光谱仪和探测器做出了简要介绍,展示了目前中红外集成光子传感器件的研究进展,并对其未来发展做出了展望。

     

    Abstract: In recent years, mid-infrared (wavelength range of 2–20 μm) integrated photonics has received a lot of attention for its potential applications, including absorption spectroscopy, thermal imaging, and free-space communication. The mid-infrared, which includes several atmospheric transparency windows, has an inherent advantage for sensing applications. The mid-infrared photonic devices also benefit from the mature technologies developed in the near-infrared for device design, test, and fabrication. In addition, integrated photonic sensors have demonstrated comparable sensitivity to their bulk counterparts, while featuring low power consumption, low cost, compact structure, and easy integration with other devices. Therefore, the mid-infrared integrated photonic sensors will play an important role in industrial detection, scientific research, medical diagnosis, military security, life, and other fields in the future. Here, Recent advances in the mid-infrared integrated photonic sensors have been reviewed. Three major components, sensing unit, spectrometer, and detector were discussed. An outlook for its future development was also proposed.

     

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