[1]
[2] Malacara D. Optical Shop Testing[M]. 3rd ed. New Jersey:John Wiley Sons, Inc, 2007.
[3] Zhu Rihong, Chen Lei, Wang Qing, et. al. Phase shifting interferometry and its application[J]. Journal of Applied Optics, 2008, 27(2): 85-88. (in Chinese) 朱日宏, 陈磊, 王青, 等. 移相干涉测量术及其应用研究[J]. 应用光学, 2008, 27 (2): 85-88.
[4]
[5] Leach R. Optical Measurement of Surface Topography[M]. Berlin: Springer-Berlin Heidelberg, 2011.
[6]
[7]
[8] Sandoz P. An algorithm for profilometry by white-light phase shifting interferometry[J]. Journal of Modern Optics, 1996, 43(8): 1545- 1554.
[9] Harasaki A, Schmit J, Wyant J. Improved vertical-scanning interferometer[J]. Applied Optics, 2000, 39(19): 2017-2115.
[10]
[11]
[12] Shen M, Wang W, Hwang C. White-light interferometer-micro- profile measurement based on higher steps phase shifting algorithm [C]//Fringe, 2013, 2014: 341-344.
[13] Groot P, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain [J]. Journal of Modern Optics, 1995, 42: 389-401.
[14]
[15] Ma S, Quan C, Zhu R, et al. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry[J]. Optics Communications, 2011, 284(10-11): 2488-2493.
[16]
[17] Li M, Quan C, Tay C. Continuous wavelet transform for micro- component profile measurement using vertical scanning interferometry[J]. Optics Lasers Technology, 2008, 40: 920-929.
[18]
[19] Adachi M. Phase-shift algorithm for white-light interferometry insensitive to linear errors in phase shift [J]. Optics Review, 2008, 15 (3): 148-155.
[20]
[21]
[22] Roy M, Cox G, Hariharan P. Low-coherence interference microscope with an improved switchable achromatic phase-shifter [J]. Optics Express, 2005, 13(22): 9125-9130.
[23] Yang Y, Ding Z, Wang K, et al. Full-field optical coherence tomography by achromatic phase shifting with a rotating half-wave plate[J]. Journal of Optics, 2010, 12(3): 035301.
[24]
[25]
[26] Schmit J, Olszak A. High-precision shape measurement by white- light interferometry with real-time scanner error correction [J]. Applied Optics, 2002, 42(28): 5934-5950.
[27] Wang Jun, Chen Lei. Measurement of micro-displacement using white interference based on a spatial frequency domain algorithm[J]. Infraded and Laser Engineering, 2008, 37(5): 874-877. (in Chinese) 王军, 陈磊. 基于空间频域算法的白光干涉微位移测量法[J]. 红外与激光工程, 2008, 37(5): 874-877.