[1] |
Windt D L, Bellotti J A. Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications[J]. Appl Opt, 2009, 48(26): 4932-4941. |
[2] |
|
[3] |
Jonnard P, Le Guen K, Hu M -H, et al. Optical chemical, and depth characterization of Al/SiC periodic multilayers[C]//SPIE, 2009, 7360: 73600O. |
[4] |
|
[5] |
Meltchakov E, Hecquet C, Roulliay M, et al. Development of Al-based multilayer optics for EUV[J]. Appl Phys A, 2010, 98(1): 111. |
[6] |
|
[7] |
Hu M H, Guen K L, Andr J -M, et al. Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light[J]. Opt Express, 2010, 18(19): 20019-20028. |
[8] |
|
[9] |
Meltchakov E, Ziani A, Auchere F, et al. EUV reflectivity and stability of tri-component Al-based multilayers[C]//SPIE, 2011, 8168: 816819. |
[10] |
|
[11] |
|
[12] |
Zhong Q, Li W B, Zhang Z, et al. Optical and structural performance of the Al/Zr reflection multilayers in the 17-19 nm region[J]. Opt Express, 2012, 20(10): 10692-10700. |
[13] |
|
[14] |
Zhong Q, Zhang Z, Zhu J T, et al. The chemical characterization and reflectivity of the Al(1.0%wtSi)/Zr periodic multilayer[J]. Appl Surf Science, 2012, 259: 371-375. |
[15] |
Zhong Q, Zhang Z, Zhu J T, et al, The thermal stability of Al(1% wtSi)/Zr EUV mirrors [J]. Appl Phys A, 2012, 109(1): 133-138. |
[16] |
|
[17] |
Voronov D L, Anderson E H, Cambie R, et al. A 10,000 groove/mm multilayer coated grating for EUV spectroscopy [J]. Opt Express, 2011, 19 (7): 6320-6325. |
[18] |
|
[19] |
|
[20] |
Voronov D L, Anderson E H, Cambie R, et al. Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates[C]//SPIE, 2011, 8139: 81390B 1-10. |
[21] |
|
[22] |
Pershyn Y P, Zubarev E N, Kondratenko V V, et al. Reactive diffusion in Sc/Si multilayer X-ray mirrors with CrB2 barrier layers[J]. Appl Phys A, 2011, 103(4): 1021-1031. |
[23] |
Hu Minhui, Guen K L, Andr J -M, et al. Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light[J]. Opt Express, 2010, 18(19): 20019-28. |
[24] |
|
[25] |
Jonnard P, Maury H, Guen K L, et al. Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers[J]. Surf Science, 2010, 604(S11-12): 1015-1021. |
[26] |
|
[27] |
Wang F L, Wang Z S, Zhang Z, et al. W/B4C, W/C, W/Si multilayers[J]. Opt Precision Eng, 2005, 13: 28-33. (in Chinse) |
[28] |
|
[29] |
Wormington M, Panaccione C, Matney K M, et al. Characterization of low-Z material layer profiles in bilayer structures by X-ray reflectivity measurement[J]. Opt Precision Eng, 2007, 15: 1838-1843. |
[30] |
|
[31] |
Matthew W, Charles P, Kevin M, et al. Characterization of structures from X-ray scattering data using genetic algorithms[J]. Philos Trans R Soc Lond, 1999, A357: 2827-2848. |