[1] Jung S, Kim S. Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control[J]. Precision Engineering, 1994, 16(1):57-63.
[2] Fan K C, Fei Y T, Yu X F, et al. Development of a low-cost micro-CMM for 3D micro/nano measurements[J]. Measurement Science and Technology, 2006, 17(3):524-532.
[3] Steinmetz C R. Sub-micron position measurement and control on precision machine tools with laser interferometer[J]. Prec Eng, 1990, 12(1):12-24.
[4] Polit S, Dong J. Development of a high-bandwidth XY nanopositioning stage for high-rate micro/nano-manufacturing[J]. IEEE/ASME Trans Mechatronics, 2011, 16(4):724-733.
[5] Ji H W, Wen Y Q. Model and control on hysteresis of piezoelectric actuator[J]. Advanced Materials Research, 2011, 179:635-640.
[6] Haitjem A H. Achieving traceability and sub-nanometer uncertainty using interferometric techniques[J]. Measurement Science and Technology, 2008, 19:1-6.
[7] Heydemann P L M. Determination and correction of quadrature fringe measurement errors in interferometers[J]. Applied Opt, 1981, 20(9):3382-3384.
[8] Fang C. An improved design of the linear diffraction grating interferometer[J]. Proceedings of ASPEN, 2009, 11:11-13.
[9] Sirisena H, Teng F. Multivariable pole-zero placement selftuning controller[J]. International Journal of Systems Science, 1986, 17:345-352.
[10] Wang J, Kang L Y, Cao B G. Neural network PID control of a distributed power generation system based on renewable energy[J]. Journal of Applied Sciences, 2005, 5(10):1772-1776.
[11] Dai Junke, Jiang Haiming, Zhong Qirun, et al. LD temperature control system based on self-tuning fuzzy PID algorithm[J]. Infrared and Laser Engineering, 2014, 43(10):3287-3291. (in Chinese)
[12] Zhan Juntong, Fu Qiang, Duan Jin, et al. Stability improvement of DFB laser driving power using digital position PID algorithm[J]. Infrared and Laser Engineering, 2015, 44(6):1757-1761. (in Chinese)