[1] Dong Yanhao, Yang Hongbing, Zhang Lin, et al. Ultra‐uniform nanocrystalline materials via two‐step sintering [J]. Advanced Functional Materials, 2020, 31: 2007750. doi:  10.1002/adfm.202007750
[2] Hu Chunguang, Zha Ridong, Ling Qiuyu, et al. Super-resolution microscopy applications and development in living cell [J]. Infrared and Laser Engineering, 2017, 46(11): 1103002. (in Chinese) doi:  10.3788/IRLA201746.1103002
[3] Du Chenhui, Gong Liang, Cai Xiaoyong, et al. Micro-nanometer scale vibration in imaging of metrological scanning electron microscope [J]. Optics and Precision Engineering, 2019, 27(4): 860-867. (in Chinese) doi:  10.3788/OPE.20192704.0860
[4] Wu Ziruo, Cai Yanni, Wang Xingrui, et al. Investigation of AFM tip characterization based on multilayer gratings [J]. Infrared and Laser Engineering, 2020, 49(2): 0213001. (in Chinese) doi:  10.3788/IRLA202049.0213001
[5] Shearer C J, Slattery A D, Stapleton A J, et al. Accurate thickness measurement of graphene [J]. Nanotechnology, 2016, 27(12): 125704. doi:  10.1088/0957-4484/27/12/125704
[6] Yacoot A, Koenders L, Wolff H. An atomic force microscope for the study of the effects of tip-sample interactions on dimensional metrology [J]. Meas Sci Technol, 2007, 18(2): 350-359.
[7] Zhi Li, Uwe Brand, Helmut Wolff, et al. Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution[C]//Proc SPIE, Optical Measurement Systems for Industrial Inspection X, 2017, 10329: 1032944.
[8] Podzorny Tomasz, Budzyń Grzegorz, Rzepka J. Linearization methods of laser interferometers for pico/nano positioning stages [J]. Optik-International Journal for Light and Electron Optics, 2013, 124(23): 6345-6348. doi:  10.1016/j.ijleo.2013.05.054
[9] Wu C M, Su C S. Nonlinearity in measurements of length by optical interferometry [J]. Meas Sci Technol, 1995, 7(1): 62-68.
[10] Yacoot A, Dows M. The use of X-ray interferometry to investigate the linearity of the NPL plane mirror differential optical interferometer [J]. Meas Sci Technolo, 2000, 11(8): 1126-1130. doi:  10.1088/0957-0233/11/8/305
[11] Zeng Zhaoli, Zhang Shulian. Nanometrology technology in precision measurement [J]. Journal of Applied Optics, 2012, 33(5): 846-854. (in Chinese)
[12] Zhu Minhao, Wu Xuejian, Wei Haoyun, et al. Closed-loop displacement control system for piezoelectric transducer based on optical frequency comb [J]. Acta Phys Sin, 2013, 62(7): 070702. (in Chinese) doi:  10.7498/aps.62.070702
[13] Haroutunyan L A, Balyan M K. X-Ray on-axis Fresnel holography using three-block Fresnel zone plate interferometer [J]. Journal of Contemporary Physics (Armenian Academy of Sciences), 2020, 55(3): 248-253.
[14] Downs M J, Nunn J W. Verification of the sub-nanometric capability of an NPL differential plane mirror interferometer with a capacitance probe [J]. Meas Sci Technol, 1998, 9(9): 1437-1440.
[15] Heydemann P L M. Determination and correction of quadrature fringe measurement errors in interferometers [J]. Appl Opt, 1981, 20(19): 3382-3384.