(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

李晋桃; 衡成林; 张红艳; 殷鹏刚

(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

1.
北京理工大学物理学院,北京 100081;
2.
北京航空航天大学化学与环境学院,北京 100191

基金项目:

教育部博士点基金（20111101120021）

详细信息

作者简介:
李晋桃（1990- ），女，硕士生，主要从事稀土掺杂纳米材料发光方面的研究。Email：lijintaobit@126.com；衡成林（1972- ），男，硕士生导师，主要从事领域为硅基纳米半导体光电性质和稀土掺杂方面的研究。Email：hengcl@bit.edu.cn

李晋桃（1990- ），女，硕士生，主要从事稀土掺杂纳米材料发光方面的研究。Email：lijintaobit@126.com；衡成林（1972- ），男，硕士生导师，主要从事领域为硅基纳米半导体光电性质和稀土掺杂方面的研究。Email：hengcl@bit.edu.cn

中图分类号: O484.4⁺1

Photoluminescence and structure of (Ce, Yb) co-doped silicon oxides

1.
School of Physics,Beijing Institute of Technology,Beijing 100081,China;
2.
School of Chemistry and Environment,Beihang University,Beijing 100191,China

摘要: 采用磁控溅射技术在单晶硅衬底上制备了稀土（Ce，Yb）共掺杂氧化硅薄膜，研究了薄膜样品的结构和下转换发光性质。样品的发光光谱显示，在He-Cd激光器325 nm线的激发下，Ce3+离子的发光强度较弱而Yb3+离子的发光较强；Yb3+的发光随着退火温度的升高逐渐增强；这些结果加上样品的激发光谱和衰变光谱，都显示样品中发生了Ce3+ 到Yb3+的能量传递过程。X射线衍射结果表明，样品在高温退火时（大于1 000 ℃）出现晶化，形成了Ce和Yb的硅酸盐结构。笔者认为利用高温退火形成Ce的硅酸盐结构可以明显增强Yb3+的发光，从而提高薄膜的下转换发光效率。
- 下转换发光 /
- 稀土掺杂 /
- 氧化硅薄膜 /
- 硅酸盐
Abstract: Cerium (Ce) and ytterbium (Yb) co-doped silicon oxide (SiOx: Ce, Yb) thin films were deposited by using magnetron co-sputtering technique. The down-conversion photoluminescence (PL) properties and structural evolution of the films after thermal treatments were studied. Under the excitation of a He-Cd 325 line, light emissions from the Ce3+ ions are rather weak while quite strong from the Yb3+ ions; the Yb PL intensity increases with elevating the anneal temperature, and both PL excitation and decay spectra indicate that energy transfer from Ce3+ to Yb3+ ions has taken place in the oxides. X-ray diffraction patterns show that Ce and Yb-related silicates have formed as the annealing temperature is higher than 1 000 ℃. The authors believe that the Yb PL can be enhanced greatly by forming high-luminescent Ce3+-related silicates in the oxide films, and thus increase the down-conversion efficiency.
- down conversion /
- rear-earth doped /
- silicon oxide film /
- silicate

[1]	Zhang Q Y, Huang X Y. Recent progress in quantum cutting phosphors [J]. Progress in Materials Science, 2010, 55: 353-427.
[2]
[3]
[4]	Zheng W, Zhu H M, Li R F, et al. Visible-to-infrared quantum cutting by phonon-assisted energy transfer in YPO4:Tm3+,Yb3+ phosphors[J]. Phys Chem Chem Phys, 2012, 14: 6974-6980.
[5]
[6]	Terra I A A, Borrero-Gonzlez L J, Carvalho J M, et al. Spectroscopic properties and quantum cutting in Tb3+Yb3+ co-doped ZrO2 nanocrystals [J]. J Appl Phys, 2013, 113: 073105.
[7]
[8]	Lau M K, Hao J H. Near-infrared quantum cutting in Eu3+-Yb3+ co-doped YAG through downconversion for silicon solar Cell [J]. Energy Procedia, 2012, 15: 129-134.
[9]	Wen H L, Tanner P A. Energy transfer and luminescence studies of Pr3+, Yb3+ co-doped lead borate glass [J]. Opt Mater, 2011, 33: 1602-1606.
[10]
[11]
[12]	Zhou J J, Zhuang Y X, Ye S, et al. Broadband down conversion based infrared quantum cutting by cooperative energy transfer from Eu2+ to Yb3+ in glasses [J]. Appl Phys Lett, 2009, 95: 141101.
[13]
[14]	Teng Y, Zhou J J, Liu X F, et al. Efficient broadband near-infrared quantum cutting for solar cells [J]. Opt Express, 2010, 18: 9671-9676.
[15]	Liu X F, Teng Y, Zhuang Y X, et al. Broadband conversion of visible light to near-infrared emission by Ce3+, Yb3+ co-doped yttrium aluminum garnet [J]. Opt Lett, 2009, 34: 3565-3567.
[16]
[17]
[18]	Ueda J, Tanabe S. Visible to near infrared conversion in Ce3+-Yb3+ Co-doped YAG ceramics [J]. J Appl Phys, 2009, 106: 043101.
[19]
[20]	Gao B, Yan Q Q, Tong Y, et al. Highly efficient near-infrared quantum cutting in Ce3+/Yb3+ co-doped chalcohalide glasses [J]. J Lumin, 2013, 143: 181-184.
[21]
[22]	Zhang H, Liu X Y, Zhao F Y, et al. Efficient visible to near-infrared energy transfer in Ce3+-Yb3+ co-doped Y2SiO5 phosphors [J]. Opt Mater, 2012, 34: 1034-1036.
[23]
[24]	Chen J D, Zhang H, Li F, et al. High efficient near-infrared quantum cutting in Ce3+, Yb3+ co-doped LuBO3 phosphors [J]. Mater Chem Phys, 2011, 128: 191-194.
[25]	Choi W C, Lee H N, Kim E K. Violet/blue light-emitting cerium silicates [J]. Appl Phys Lett, 1999, 75: 2389-2391.
[26]
[27]	Li J, Zalloum O, Roschuk T, et al. The formation of light emitting cerium silicates in cerium-doped silicon oxides [J]. Appl Phys Lett, 2009, 94: 011112.
[28]
[29]
[30]	Li J, Zalloum O H Y, Roschuk T, et al. Light emission from rare-earth doped silicon nanostructures [J]. Adva Opt Tech, 2008, 2008: 295601.
[31]	Kepiński L, Hreniak D, Strek W. Microstructure and luminescence properties of nanocrystalline cerium silicates [J]. J Alloys Compd, 2002, 341: 203-207.
[32]
[33]
[34]	Rebohle L, Borany J, Frb H, et al. Blue photo- and electroluminescence of silicon dioxide layers ion-implanted with group IV elements [J]. Appl Phys B, 2000, 71: 131-151.
[35]	Sun J M, Prucnal S, Skorupa W, et al. Increase of blue electroluminescence from Ce-doped SiO2 layers through sensitization by Gd3+ ions [J]. Appl Phys Lett, 2006, 89: 091908.

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(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

Photoluminescence and structure of (Ce, Yb) co-doped silicon oxides

计量

(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

1. 北京理工大学物理学院,北京 100081;

2. 北京航空航天大学化学与环境学院,北京 100191

English Abstract

Photoluminescence and structure of (Ce, Yb) co-doped silicon oxides

1. School of Physics,Beijing Institute of Technology,Beijing 100081,China;

2. School of Chemistry and Environment,Beihang University,Beijing 100191,China

全文HTML

目录

留言板

(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

Photoluminescence and structure of (Ce, Yb) co-doped silicon oxides

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(Ce，Yb）共掺杂氧化硅薄膜的发光特性及结构

1. 北京理工大学 物理学院,北京 100081; 2. 北京航空航天大学 化学与环境学院,北京 100191

English Abstract

Photoluminescence and structure of (Ce, Yb) co-doped silicon oxides

1. School of Physics,Beijing Institute of Technology,Beijing 100081,China; 2. School of Chemistry and Environment,Beihang University,Beijing 100191,China

全文HTML

目录

1. 北京理工大学物理学院,北京 100081;

2. 北京航空航天大学化学与环境学院,北京 100191

1. School of Physics,Beijing Institute of Technology,Beijing 100081,China;

2. School of Chemistry and Environment,Beihang University,Beijing 100191,China