回转内圆柱面的非拼接干涉测量方法

孙昊; 韩森; 唐寿鸿; 王芳

doi:10.3788/IRLA201746.0717001

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回转内圆柱面的非拼接干涉测量方法

孙昊, 韩森, 唐寿鸿, 王芳

文章导航 > 红外与激光工程 > 2017 > 46(7): 717001-0717001(7)

孙昊, 韩森, 唐寿鸿, 王芳. 回转内圆柱面的非拼接干涉测量方法[J]. 红外与激光工程, 2017, 46(7): 717001-0717001(7). doi: 10.3788/IRLA201746.0717001

引用本文:

孙昊, 韩森, 唐寿鸿, 王芳. 回转内圆柱面的非拼接干涉测量方法[J]. 红外与激光工程, 2017, 46(7): 717001-0717001(7). doi: 10.3788/IRLA201746.0717001

Sun Hao, Han Sen, Tang Shouhong, Wang Fang. Method of no stitching interferometric measurement for rotatory cylindrical surface[J]. Infrared and Laser Engineering, 2017, 46(7): 717001-0717001(7). doi: 10.3788/IRLA201746.0717001

Citation:

Sun Hao, Han Sen, Tang Shouhong, Wang Fang. Method of no stitching interferometric measurement for rotatory cylindrical surface[J]. Infrared and Laser Engineering, 2017, 46(7): 717001-0717001(7). doi: 10.3788/IRLA201746.0717001

回转内圆柱面的非拼接干涉测量方法

doi: 10.3788/IRLA201746.0717001

孙昊¹,
韩森^2,3,
唐寿鸿³,
王芳²

1.
长春理工大学光电工程学院,吉林长春 130022;
2.
上海理工大学光电信息与计算机工程学院,上海 200093;
3.
苏州慧利仪器有限责任公司,江苏苏州 215123

基金项目:

国家科技重大专项（2013YQ150829）;上海市科研计划项目（14140502500）

详细信息

作者简介:
孙昊(1987-),男,博士生,主要从事光学干涉计量方面的研究。Email:claudia_ss@163.com

中图分类号: O436.1

Method of no stitching interferometric measurement for rotatory cylindrical surface

1.
School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;
2.
College of Opto-Electronic Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;
3.
Suzhou H &L Instruments LLC,Suzhou 215123,China

摘要: 介绍了一个特殊结构的干涉测试方法和系统，基于Fizeau（菲索）干涉原理，通过一高精度直角圆锥镜来实现圆柱坐标系与直角坐标的转换。该系统可以用来测量360回转圆柱的表面形貌，并且无需图像拼接，可一次性获取整周的面形数据。通过对系统主成分误差的计算分析，及Matlab软件数值仿真，建立了圆柱坐标系下的误差校正矩阵。并针对一环形样品进行实际测量，测试结果经过主成分误差校正后，与Taylor Hobson接触式圆柱度仪的测量结果一致，通过最小二乘圆（LSC）的圆度评定方法计算得到的圆度误差值十分接近。实验结果表明：该测量方法可有效地实现圆柱体整周表面形貌的测量，解决了目前回转光学元件的测量难度大、测试效率低等问题。
- Fizeau干涉仪 /
- 回转圆柱面 /
- 角锥反射镜 /
- 误差校正
Abstract: A new method and a Fizeau type interference system were introduced in this paper, cylindrical coordinates and cartesian coordinates can be mutual transformation, through a high precision 90℃onical reflector. This system was suitable for the test of 360rotatory cylindrical surface, and the whole surface information can be achieved with one measurement without stitching. The error correction matrix was established in cylindrical coordinates, after analyzing the main component system errors, and simulating their effect with Matlab. A metal ring was tested to prove the feasibility and validity of this method and system. The principal error correction result was consistent with the measurement result by Taylor Hobson, and it was very close to the roundness value, which was calculated through the least square circle (LSC) assessment method. The experimental results show that:this method and system can realized the 360℃ylindrical surface measurement, and the problems of rotary elements testing, low efficiency will be solved.
- Fizeau interferometry /
- rotatory cylinder surface /
- axicon mirror /
- errors calibration

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回转内圆柱面的非拼接干涉测量方法

doi: 10.3788/IRLA201746.0717001

1. 长春理工大学光电工程学院,吉林长春 130022;

2. 上海理工大学光电信息与计算机工程学院,上海 200093;

3. 苏州慧利仪器有限责任公司,江苏苏州 215123

作者简介:
孙昊(1987-),男,博士生,主要从事光学干涉计量方面的研究。Email:claudia_ss@163.com

收稿日期: 2016-11-10
修回日期: 2016-12-20
刊出日期: 2017-07-25

基金项目:

国家科技重大专项（2013YQ150829）;上海市科研计划项目（14140502500）

中图分类号: O436.1

关键词:

摘要: 介绍了一个特殊结构的干涉测试方法和系统，基于Fizeau（菲索）干涉原理，通过一高精度直角圆锥镜来实现圆柱坐标系与直角坐标的转换。该系统可以用来测量360回转圆柱的表面形貌，并且无需图像拼接，可一次性获取整周的面形数据。通过对系统主成分误差的计算分析，及Matlab软件数值仿真，建立了圆柱坐标系下的误差校正矩阵。并针对一环形样品进行实际测量，测试结果经过主成分误差校正后，与Taylor Hobson接触式圆柱度仪的测量结果一致，通过最小二乘圆（LSC）的圆度评定方法计算得到的圆度误差值十分接近。实验结果表明：该测量方法可有效地实现圆柱体整周表面形貌的测量，解决了目前回转光学元件的测量难度大、测试效率低等问题。

English Abstract

Method of no stitching interferometric measurement for rotatory cylindrical surface

1. School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;

2. College of Opto-Electronic Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;

3. Suzhou H &L Instruments LLC,Suzhou 215123,China

Received Date: 2016-11-10
Rev Recd Date: 2016-12-20
Publish Date: 2017-07-25

Keywords:

Abstract: A new method and a Fizeau type interference system were introduced in this paper, cylindrical coordinates and cartesian coordinates can be mutual transformation, through a high precision 90℃onical reflector. This system was suitable for the test of 360rotatory cylindrical surface, and the whole surface information can be achieved with one measurement without stitching. The error correction matrix was established in cylindrical coordinates, after analyzing the main component system errors, and simulating their effect with Matlab. A metal ring was tested to prove the feasibility and validity of this method and system. The principal error correction result was consistent with the measurement result by Taylor Hobson, and it was very close to the roundness value, which was calculated through the least square circle (LSC) assessment method. The experimental results show that:this method and system can realized the 360℃ylindrical surface measurement, and the problems of rotary elements testing, low efficiency will be solved.