[1]
|
Wu Junjie, Lei Lihua, Chen Xin, et al. A three-dimensional microdisplacement sensing system based on MEMS bulk-silicon technology[J]. Sensors, 2014, 14:20533-20542. |
[2]
|
Spengen W M V. MEMS reliability from a failure mechanisms perspective[J]. Microelectronics Reliability, 2003, 43(7):1049-1060. |
[3]
|
Bojan M, Apostol D, Iordache I, et al. R3 measurement by white light interferometry[C]//Proceedings of SPIE, 2012, 8411(5):1-24. |
[4]
|
Maniscalco B, Kaminski P M, Walls J M. Thin film thickness measurements using scanning white light interferometry[J]. Thin Solid Films, 2014, 550:10-16. |
[5]
|
Dubey V, Singh V, Ahmad A, et al. White light phase shifting interferometry and color fringe analysis for the detection of contaminants in water[C]//Quantitative Phase Imaging II. International Society for Optics and Photonics, 2016. |
[6]
|
Xie Jin, Liu Xuran, Wu Keke, et al. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Optics and Precision Engineering, 2014, 22(2):376-382. (in Chinese) |
[7]
|
Heikkinen V, Kassamakov I, Hggstrm E, et al. Scanning white light interferometry, -A new 3D forensics tool[C]//IEEE International Conference on Technologies for Homeland Security. IEEE, 2011:332-337. |
[8]
|
Zou Wendong, Huang Changhui, Zhen Qiang, et al. Measurement of microscopic surface topography of alloy dimple fracture by scanning white-light interferometry[J]. Optics and Precision Engineering, 2011, 19(7):1612-1619.(in Chinese) |
[9]
|
Bian Y, Guo T, Li F, et al. Large step structure measurement by using white light interferometry based on adaptive scanning[C]//Proceedings of SPIE, 2013, 8759:87594T. |
[10]
|
Popiolek-Masajada A, Urbanczyk W, Pavli?ek P, et al. White-light interferometry with high measurement speed[C]//Proceedings of SPIE, 2014, 9441:944115. |
[11]
|
Pacholik A, Muller M, Fengler W, et al. GPU vs FPGA:example application on white light interferometry[C]//International Conference on Reconfigurable Computing and FPGAS. IEEE, 2011:481-486. |
[12]
|
You J, Kim Y J, Kim S W. GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements[J]. International Journal of Nanomanufacturing, 2012, 8(1/2):31-39. |
[13]
|
Chong W K, Li X, Soh Y C. Spectral effects of dual wavelength low coherence light source in white light interferometry[J]. Optics Lasers in Engineering, 2013, 51(6):651-655. |
[14]
|
Ai C, Novak E L. Centroid approach for estimating modulation peak in broad-bandwidth interferometry:US, US5633715[P]. 1997-05-27. |
[15]
|
Chim S S C, Kino G S. Three-dimensional image realization in interference microscopy[J]. Applied Optics, 1992, 31(14):2550-2553. |
[16]
|
Hart M, Vass D G, Begbie M L. Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy[J]. Applied Optics, 1998, 37(10):1764. |
[17]
|
Groot P D, Lega X C D. Signal modeling for low-coherence height-scanning interference microscopy[J]. Applied Optics, 2004, 43(25):4821-4830. |