n波导层铟组分对GaN基绿光激光二极管光电性能的影响

Influence of indium composition of n waveguide layer on photoelectric performance of GaN-based green laser diode

  • 摘要: 高功率GaN基激光二极管外延结构理论仿真对提高GaN基激光二极管的光电性能具有重要的指导意义。设计了一种n侧双波导结构的绿光激光二极管外延结构,讨论了激光器外延结构中n-InxGa1−xN波导层中铟组分对其光电性能的影响,揭示了n-InxGa1−xN波导层对激光二极管光电性能的影响机制。通过调控n-InxGa1−xN波导层中铟组分,调控外延层中的光场分布,使光场发生了偏移。结果表明,当n侧InxGa1−xN波导层中铟组分最佳值为0.07时,将光子损耗降低了0.2 cm−1,阈值电流由193.49 mA降低到115.98 mA,此外,器件的光子损耗最少,阈值电流最小,工作电压最低,从而提高了激光二极管的输出功率和电光转换效率。因此,当绿光激光二极管的注入电流密度为6 kA/cm2时,功率输出达234.95 mW。n侧双波导结构设计为制备高功率绿光激光二极管提供了理论指导和数据支撑。

     

    Abstract: The theoretical simulation of the extension structure of high-power GaN-based laser diodes is of great significance to improve the photoelectric performance of GaN-based laser diodes. A green laser diode extension structure with an n-side dual-wave conductor structure was designed. The effect of indium parts in the n-InxGa1−xN waveguide layer on its photoelectronic performance in laser extension structure was discussed. And the mechanism of the n-InxGa1−xN waveguide layer on the photoelectronic performance of laser diode was clarified. The results showed that when the indium part of the n-side InxGa1−xN waveguide layer was 0.07, the photon loss was minimal, and the threshold current was the lowest. When the indium part of the n-side waveguide layer was high or low, photon loss and operating voltage were increased, and meanwhile, the output power of the laser diode was reduced. Therefore, by regulating indium parts in the n-InxGa1−xN waveguide layer and controlling the optical field distribution of the outer layer, the photon loss was reduced by 0.2 cm−1, and the threshold current was reduced by 193.49 mA to 115.98 mA, and the operating voltage was reduced, which increased the output power and electro-optical conversion efficiency of the laser diode, increased the laser output power to 234.95 mW at 6 kA/cm2. The n-side dual-waveguide structure design provides theoretical guidance and data support for the preparation of high-power green laser diodes.

     

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