李俊斌, 刘爱民, 蒋志, 杨晋, 杨雯, 孔金丞, 李东升, 李艳辉, 周旭昌. InAs/GaSb超晶格长波红外探测器暗电流特性分析[J]. 红外与激光工程, 2022, 51(4): 20210399. DOI: 10.3788/IRLA20210399
引用本文: 李俊斌, 刘爱民, 蒋志, 杨晋, 杨雯, 孔金丞, 李东升, 李艳辉, 周旭昌. InAs/GaSb超晶格长波红外探测器暗电流特性分析[J]. 红外与激光工程, 2022, 51(4): 20210399. DOI: 10.3788/IRLA20210399
Li Junbin, Liu Aimin, Jiang Zhi, Yang Jin, Yang Wen, Kong Jincheng, Li Dongsheng, Li Yanhui, Zhou Xuchang. Analysis of dark current characteristic of InAs/GaSb superlattice longwave infrared detectors[J]. Infrared and Laser Engineering, 2022, 51(4): 20210399. DOI: 10.3788/IRLA20210399
Citation: Li Junbin, Liu Aimin, Jiang Zhi, Yang Jin, Yang Wen, Kong Jincheng, Li Dongsheng, Li Yanhui, Zhou Xuchang. Analysis of dark current characteristic of InAs/GaSb superlattice longwave infrared detectors[J]. Infrared and Laser Engineering, 2022, 51(4): 20210399. DOI: 10.3788/IRLA20210399

InAs/GaSb超晶格长波红外探测器暗电流特性分析

Analysis of dark current characteristic of InAs/GaSb superlattice longwave infrared detectors

  • 摘要: 利用二极管电流解析模型分析了InAs/GaSb超晶格长波红外探测器暗电流的主导机制。首先,通过变面积二极管I-V测试证实77 K下采用阳极硫化加SiO2复合钝化的InAs/GaSb超晶格长波红探测器的暗电流主要来自于体电流,而非侧壁漏电流;然后,利用扩散电流、产生复合电流、直接隧穿电流和陷阱辅助隧穿电流模型对InAs/GaSb超晶格长波红外探测器的暗电流进行拟合分析。结果表明:在小的反向偏压下(≤60 mV),器件暗电流主要由产生复合电流主导,而在高偏压下(>60 mV),器件暗电流则主要由缺陷陷阱辅助隧穿电流主导。并分析了吸收层掺杂浓度对这两种电流的影响,证实5×1015~1×1016 cm−3是优化的掺杂浓度。

     

    Abstract: In this article, the dark current dominant mechanism of longwave infrared detectors based on InAs/GaSb superlattice were analyzed by using the analytical current model of diode. Firstly, the I-V test of variable area diode were performed, which confirm the dark current of InAs/GaSb superlattice longwave detector passivated by anodic sulfidization and SiO2 were mainly originated from bulk current, not from surface leakage current; Then, the dark current of InAs/GaSb longwave infrared detectors were fitted by the current model of diffusion current, generation-recombination current, direct tunnel current, trap-assisted tunnel current. The result indicate the dark current of detector was dominated by G-R current at low reverse bias (≤60 mV), while at high bias (>60 mV), the dark current is dominated by direct tunnel current. The effect of doping density of absorption layer on these two currents are analyzed, and confirm that the optimum doping density is 5×1015-1×1016 cm−3.

     

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