韦敏习, 尚万里, 侯立飞, 孙奥, 车兴森, 杨国洪. 高精度X射线柱面弯晶检测方法[J]. 红外与激光工程, 2022, 51(10): 20211121. DOI: 10.3788/IRLA20211121
引用本文: 韦敏习, 尚万里, 侯立飞, 孙奥, 车兴森, 杨国洪. 高精度X射线柱面弯晶检测方法[J]. 红外与激光工程, 2022, 51(10): 20211121. DOI: 10.3788/IRLA20211121
Wei Minxi, Shang Wanli, Hou Lifei, Sun Ao, Che Xingsen, Yang Guohong. High accuracy inspection of cylindrical curved crystal with X-ray source[J]. Infrared and Laser Engineering, 2022, 51(10): 20211121. DOI: 10.3788/IRLA20211121
Citation: Wei Minxi, Shang Wanli, Hou Lifei, Sun Ao, Che Xingsen, Yang Guohong. High accuracy inspection of cylindrical curved crystal with X-ray source[J]. Infrared and Laser Engineering, 2022, 51(10): 20211121. DOI: 10.3788/IRLA20211121

高精度X射线柱面弯晶检测方法

High accuracy inspection of cylindrical curved crystal with X-ray source

  • 摘要: 以实验室中的X射线管作为光源,配合CMOS 探测器涂层闪烁体纤维面板实时在线记录设备,建立了柱面弯晶检测平台。通过高精度的同轴转台设计,将整个柱面弯晶曲面转换为多个线段区间来分别进行检测,并对光路排布以及谱线的位置移动进行了解析计算。选用铁靶材X射线管(K_\alpha特征谱线波长为0.193 6 nm)作为实验光源,曲率半径120 mm的石英柱面弯晶作为样品,实验获得了清晰的铁特征谱线(Fe-Kα和Fe-Kβ)。通过分析柱面弯晶上9个采样位置的图像,发现Fe-Kα谱线位置移动了96 μm,对应的半径偏差为40 μm,\Delta R/R为0.033%。经过检测的石英柱面弯晶已经在大型激光装置上应用,并获得高质量的光谱图像,证明了该实验方法对柱面弯晶品质检测的有效性。

     

    Abstract: A novel method of cylindrical curved crystal inspection is presented utilized the X-ray tube as the light source and the CMOS detector coated scintillator fibre faceplate as the on-line recorder. According to the design of the high accuracy coaxial turntable, the whole cylindrical curved crystal surface is converted into several line segments to be detected separately, and the arrangement of optical paths and the position shift of spectral lines are calculated analytically. The iron target X-ray tube (the wavelength of Kβ feature spectral line is 0.193 6 nm) is selected as the experimental light source. The iron material X-ray tube is chosen as the X-ray source. The sample is quartz cylindrical curved crystal with the 120 mm radius of curvature. The feature spectral lines of Fe-Kα and Fe-Kβ are observed clearly. The Fe-Kα spectral line is shifted 96 μm through analyzing image of 9 sample locations on the cylindrical curved crystal. The deviation of the radius is 40 μm and ΔR/R is 0.033%. It shows that the sample was curved in high accuracy. The tested cylindrical curved crystal has been applied on the experiments carried on the large laser facility and the high performance spectral data is acquired. It demonstrates that the method of curved crystal inspection is available and useful.

     

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