Abstract: Micro-structural elements on tilted and curved surfaces has important applications in microelectronics, micro-optics, micro-fluidics and other fields. In order to achieve rapid and low-cost lithography of tilted and curved surfaces, the method is proposed, in which pure phase computer generated holography technology based on liquid crystal spatial light modulator is used to project target pattern to the tilted and curved surfaces completing exposure. The tilted and curved surfaces pure phase computer generated holographic light fields are generated, and the speckle elimination and stray light removal of the optical field are processed. The experimental verification of tilted and curved surfaces lithography is completed. The experimental results show that the method has high machining efficiency, flexible design and is not limited by a single structure. It is a potential 3D micro-nano machining method.