[1]
|
Wang X. Research progress of infrared focal plane array detector [J]. Ship Electronic Engineering, 2020, 40(9): 157-161. (in Chinese) |
[2]
|
Niklaus F, Vieider C, Jakobsen H. MEMS-based uncooled infrared bolometer arrays: A review [C]//MEMS/MOEMS Technologies and Applications III, Proc of SPIE, 2008, 6836: 68360D. |
[3]
|
Xu D, Wang Y, Xiong B, et al. MEMS-based thermoelectric infrared sensors: A review [J]. Frontiers of Mechanical Engineering, 2017, 12(4): 557-566. doi: 10.1007/s11465-017-0441-2 |
[4]
|
Pirro S, Mauskopf P. Advances in bolometer technology for fundamental physics [J]. Annual Review of Nuclear and Particle Science, 2017, 67: 161-181. doi: 10.1146/annurev-nucl-101916-123130 |
[5]
|
Tanaka A, Matsumoto S, Tsukamoto N, et al. Infrared focal plane array incorporating silicon IC process compatible bolometer [J]. IEEE Transactions on Electron Devices, 1996, 43(11): 1844-1850. doi: 10.1109/16.543017 |
[6]
|
Rogalski A. Infrared detectors: An overview [J]. Infrared Physics & Technology, 2002, 43: 187-210. |
[7]
|
Yu L, Guo Y, Zhu H, et al. Low-cost microbolometer type infrared detectors [J]. Micromachines, 2020, 11(9): 1-19. |
[8]
|
Hanson C M, Beratan H R, Owen R A, et al. Uncooled thermal imaging at texas instruments [C]//Proceedings of SPIE 1735, - The International Society for Optical Engineering, 1993, 2020: 330-339. |
[9]
|
Wood R, Han C, Kruse P. Integrated uncooled infrared detector imaging arrays [C]//Proceedings of the Technical Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 22–25 June 1992: 132–135. |
[10]
|
Yu L J, Tang L B, Yang W Y, et al. Research progress of uncooled infrared detector [J]. Infrared and Laser Engineering, 2021, 50(1): 20211013. (in Chinese) doi: 10.3788/IRLA20211013 |
[11]
|
Rogalski A. Infrared detectors: status and trends - sciencedirect [J]. Progress in Quantum Electronics, 2003, 27(2-3): 59-210. doi: 10.1016/S0079-6727(02)00024-1 |
[12]
|
Tan C L, Mohseni H. Emerging technologies for high performance infrared detectors [J]. Nanophotonics, 2018, 7(1): 169-197. doi: 10.1515/nanoph-2017-0061 |
[13]
|
Ma X, Li Y X, Huang R Y, et al. Development and application of short wave infrared detector [J]. Infrared and Laser Engineering, 2022, 51(1): 20210897. (in Chinese) doi: 10.3788/IRLA20210897 |
[14]
|
Lin P S, Shen T W, Chan K C, et al. CMOS MEMS thermoelectric infrared sensor with plasmonic metamaterial absorber for selective wavelength absorption and responsivity enhancement [J]. IEEE Sensors Journal, 2020, 20(19): 11105-11114. doi: 10.1109/JSEN.2020.2997534 |
[15]
|
Kim K D, Park S, Lee B, et al. A 80×60 micro-bolometer cmos thermal imager integrated with a low-noise 12-bit DAC [J]. IEEE Transactions on Industrial Electronics, 2020, 69(8): 8604-8608. |
[16]
|
Wang J, Tang Z, Li J, et al. A microPirani pressure sensor based on the tungsten microhotplate in a standard cmos process [J]. IEEE Transactions on Industrial Electronics, 2009, 56(4): 1086-1091. doi: 10.1109/TIE.2009.2012421 |
[17]
|
Kovacs, Gregory T A. Micromachined Transducers Sourcebook[M]. US: McGraw-Hill Inc., 1998. |
[18]
|
Arrieta I. Wien's displacement law and blackbody radiation quartiles [J]. The Physics Teacher, 2021, 59(6): 464-466. doi: 10.1119/10.0006130 |
[19]
|
Martin A. Green: Solar Cells[M]. US: Prentice-Hall Series in Solid State Physical Electronics, 1982. |
[20]
|
Zhong X, Kang X, Shen R. Physical and electrical characterization of doped amorphous silicon resistor [C]//2020 IEEE 15 th International Conference on Solid-State & Integrated Circuit Technology (ICSICT). IEEE, 2020: 1-4. |