Measurement of diffraction efficiency for diffractive optical elements with oblique incidence

Yang Liangliang

doi:10.3788/IRLA201847.0117003

Based on the double light-path experiment device measuring for diffraction efficiency of diffractive optical elements(DOEs), a correcting formula of diffraction efficiency was introduced to ensure the measurement accuracy of diffraction efficiency when light of secondary order diffraction was received by the detector after passing through the pinhole aperture. The diffraction efficiency of the designed hybrid refractive-diffractive optical system was measured at three laser wavelengths over the visible waveband for the incident angle upon microstructure surface was 12. The measurement results were simulated and analyzed. Due to some manufacturing errors and blocking effect, the measured diffraction efficiency was smaller than the theoretical. Based on the fitted curve of measurement results, the deviation of the polychromatic integral diffraction efficiency from the theoretical value was 12.84% over the 473-632.8 nm waveband.

Measurement of diffraction efficiency for diffractive optical elements with oblique incidence

1. School of New Energy and Electronics Engineering,Yancheng Teachers University,Yancheng 224051,China

Received Date: 2017-06-05

Rev Recd Date: 2017-08-25

Publish Date: 2018-01-25

Key words:

Abstract: Based on the double light-path experiment device measuring for diffraction efficiency of diffractive optical elements(DOEs), a correcting formula of diffraction efficiency was introduced to ensure the measurement accuracy of diffraction efficiency when light of secondary order diffraction was received by the detector after passing through the pinhole aperture. The diffraction efficiency of the designed hybrid refractive-diffractive optical system was measured at three laser wavelengths over the visible waveband for the incident angle upon microstructure surface was 12. The measurement results were simulated and analyzed. Due to some manufacturing errors and blocking effect, the measured diffraction efficiency was smaller than the theoretical. Based on the fitted curve of measurement results, the deviation of the polychromatic integral diffraction efficiency from the theoretical value was 12.84% over the 473-632.8 nm waveband.

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Reference (17)

[1]	Jinsong Li, Ke Feng. Optimization and analysis of multi-layer diffractive optical elements in visible waveband[J]. Optik, 2014, 125(14):3596-3598.
[2]	Xue Changxi, Cui Qingfeng, Liu Tao, et al. Optimal design of a multilayer diffractive optical element for dual waveband[J]. Optics Letters, 2010, 35(24):4157-4159.
[3]	Sun Ting, Zhang Xuanzhi, Chang Weijun, et al. Design of infrared wide waveband double-layer harmonic diffractive optical system[J]. Infrared and Laser Engineering, 2013, 42(4):951-954. (in Chinese)
[4]	Wang Mengjun, Zhao Cuiling, Han Bangjie, et al. Design of coaxial dual-band IR optical system based on harmonic diffraction[J]. Infrared and Laser Engineering, 2013, 42(10):2732-2736. (in Chinese)
[5]	Wood A P. A hybrid refractive-diffractive lens for manufacture by diamond turning[C]//SPIE, 1991, 1573:122-128.
[6]	Blough C G, Rossi M, Mack S K, et al. Single-point diamond turning and replication of visible and near-infrared diffractive optical elements[J]. Applied Optics, 1997, 36(20):4848-4654.
[7]	Zhao Junyan, Cui Qingfeng, Wang Peng. Scatter analysis of diffractive surface manufactured by single point diamond turning[C]//SPIE, 2007, 6724:67241N.
[8]	Yin Kewei, Huang Zhiqiang, Lin Wumei, et al. Analysis of effect of lateral fabrication errors on binary optical elements[J]. Opto-Electronic Engineering, 2011, 38(9):46-49. (in Chinese)
[9]	Gao Long, Xue Changxi, Yang Hongfang, et al. Effect of decenter errors on diffraction efficiency of multilayer diffractive optical elements in long infrared waveband[J]. Acta Optica Sinica, 2015, 35(6):0623004. (in Chinese)
[10]	Mao Shan, Cui Qingfeng. Effect on polychromatic integral diffraction efficiency for two-layer diffractive optics[J]. Acta Optica Sinica, 2016, 36(1):0105001. (in Chinese)
[11]	Ma Zebin, Kang Fuzeng, Wang Hao. Effect of fabrication errors of double-layer BOE on diffractive efficiency[J]. Infrared and Laser Engineering, 2016, 45(9):0918001. (in Chinese)
[12]	Yang Liangliang, Cui Qingfeng, Liu Tao, et al. Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements[J]. Applied Optics, 2011, 50(32):6128-6133.
[13]	Pei Xuedan, Cui Qingfeng, Leng Jiakai. Effect of incident angle on diffraction efficiency of a two-layer diffractive optical element[J]. Acta Optica Sinica, 2009, 29(1):120-125. (in Chinese)
[14]	Mao Shan, Cui Qingfeng, Piao Mingxu, et al. High diffraction efficiency of three-layer diffractive optics designed for wide temperature range and large incident angle[J]. Applied Optics, 2016, 55(13):3549-3554.
[15]	Yang Hongfang, Xue Changxi, Li Chuang, et al. Diffraction efficiency sensitivity to oblique incident angle for multilayer diffractive optical elements[J]. Applied Optics, 2016, 55(13):7126-7133.
[16]	Yang Liangliang, Cui Qingfeng, Liu Tao, et al. Measurement of diffraction efficiency for diffractive optical elements[J]. Acta Optica Sinica, 2012, 32(4):0412007. (in Chinese)
[17]	Swanson G J. Binary optics technology:Theoretical limts on the diffraction efficiency of multilevel diffractive optical elements[D]. US:MIT Lincoln Laboratory Technical, 1991.

Measurement of diffraction efficiency for diffractive optical elements with oblique incidence

doi: 10.3788/IRLA201847.0117003

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