Retrace error elimination for partial compensation digital Moiré phase shifting interferometry

Zhang Liqiong; Wang Shaopu; Hu Yao; Hao Qun

doi:10.3788/IRLA201847.0117005

A digital Moir phase-shifting interferometry with partial compensation lens was expounded to test the figure error of aspheric surfaces with high accuracy measurement. The real interferometer and the ideal interferometer model were established to obtain the real and ideal wavefront at the image plane of the interferometer. Then the image wavefront in the real interferometer related to the surface figure error of the aspheric surface under test was obtained by using the digital Moir phase-shifting technique. The error analysis of this measuring system was presented, and the reverse optimization procedure was applied to eliminate retrace error for the large figure error and reconstruct the test aspheric surface large figure error. Experimental results show that, compared to the profilometer, for the small figure error, the accuracy of the aspheric surface figure error measurement with the one-half method can achieve less than /20, both PV error and RMS error. For the large figure error, the reverse optimization method need to be used to obtain the accuracy of aspheric surface errors measurement of less than /5, both PV error and RMS error. Partial compensating digital Moir phase shifting interferometry for the test aspheric surface error based on reverse optimization procedure can effectively correct the retrace error, and reconstruct the large figure error of aspheric surfaces with high-accuracy.

Retrace error elimination for partial compensation digital Moiré phase shifting interferometry

1. Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China

Received Date: 2017-06-04

Rev Recd Date: 2017-08-09

Publish Date: 2018-01-25

Key words:

retrace error /
digital Moiré phase-shifting interferometry /
partial compensation /
one-half method /
reverse optimization procedure

Abstract: A digital Moir phase-shifting interferometry with partial compensation lens was expounded to test the figure error of aspheric surfaces with high accuracy measurement. The real interferometer and the ideal interferometer model were established to obtain the real and ideal wavefront at the image plane of the interferometer. Then the image wavefront in the real interferometer related to the surface figure error of the aspheric surface under test was obtained by using the digital Moir phase-shifting technique. The error analysis of this measuring system was presented, and the reverse optimization procedure was applied to eliminate retrace error for the large figure error and reconstruct the test aspheric surface large figure error. Experimental results show that, compared to the profilometer, for the small figure error, the accuracy of the aspheric surface figure error measurement with the one-half method can achieve less than /20, both PV error and RMS error. For the large figure error, the reverse optimization method need to be used to obtain the accuracy of aspheric surface errors measurement of less than /5, both PV error and RMS error. Partial compensating digital Moir phase shifting interferometry for the test aspheric surface error based on reverse optimization procedure can effectively correct the retrace error, and reconstruct the large figure error of aspheric surfaces with high-accuracy.

HTML

Reference (15)

[1]	Zhang Zhao, Sun Jingxu, Liu Zexun, et al. Optical design of THz image surface scanning with an off axis parabolic mirror[J]. Infrared and Laser Engineering, 2016, 45(7):0703003. (in Chinese)
[2]	Li Hang, Yan Changxiang. Design of wide-angle lens for 8 mega-pixel mobile phone camera[J]. Chinese Optics, 2014, 7(3):456-461. (in Chinese)
[3]	Wang Yunqi, Liu Weiqi, Zhang Daliang, et al. Design of off-axis three-mirror optical system with wide field of view based on transfer matrix[J]. Infrared and Laser Engineering, 2016, 45(4):0418003. (in Chinese)
[4]	Shi Tu, Yang Yongying, Zhang Lei, et al. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1):26-46. (in Chinese)
[5]	Wang Xiaokun. Fabrication and testing of an off-axis aspheric surface with abnormal shape[J]. Infrared and Laser Engineering, 2014, 43(9):2959-2963. (in Chinese)
[6]	Li Ming, Luo Xiao, Xue Donglin, et al. Design of CGH for testing large off-axis asphere by considering mapping distortion[J]. Optics and Precision Engineering, 2015, 23(5):1246-1253. (in Chinese)
[7]	Meng Xiaohui, Wang Yonggang, Li Wenqing, et al. Fabricating and testing of Ф420 mm high-order aspheric lens[J]. Optics and Precision Engineering, 2016, 24(12):3068-3075. (in Chinese)
[8]	Gappinger R O, John E. Greivenkamp.Iterative reverse optimization procedure for calibration of aspheric wave-front measurements on a nonnull interferometer[J]. Appl Opt, 2004, 43(27):5152-5161.
[9]	Sullivan J J. Non-Null interferometer for testing of aspheric surfaces[D]. US:University of Arizona, 2015:430-457.
[10]	Liu Dong, Shi Tu, Zhang Lei, et al. Reverse optimization reconstruction of aspheric figure error in a Non-Null interferometer[J]. Appl Opt, 2014, 53(24):5538-5546.
[11]	Shi Tu, Zang Zhongming, Liu Dong, et al. Retrace error correction for Non-Null tesing of optical aspheric surface[J]. Acta Optica Sinica, 2016, 36(8):147-157. (in Chinese)
[12]	Shen Hua. Research on Key Techniques of Tilted-Wave-Interferometer Used in the Measurement of Freeform Surfaces[M]. Nanjing:Nanjing University of Science Technology, 2014:55-74. (in Chinese)
[13]	Liu Huilan, Hao Qun, Zhu Qiudong, et al. Testing an aspheric surface using part-compensating lens[J]. Transactions of Beijing Institute of Technology, 2004, 24(7):625-628. (in Chinese)
[14]	Zhu Q, Hao Q. Aspheric surface test by digital Moir method[C]//SPIE, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies:Optical Test and Measurement Technology and Equipment, 2007, 6723:672355.
[15]	Hao Q, Hu Y, Zhu Q D. Digital Moir phase-shifting interferometric technique for aspheric testing[J]. Applied Mechanics Materials, 2014, 590:623-628.

Retrace error elimination for partial compensation digital Moiré phase shifting interferometry

doi: 10.3788/IRLA201847.0117005

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Article Metrics

Related

Proportional views