Volume 48 Issue 10
Oct.  2019
Turn off MathJax
Article Contents
Article Navigation >  Infrared and Laser Engineering  > 2019  >  48(10): 1013002-1013002(8)

Ma Long, Jia Jun, Pei Xin, Hu Yanmin, Zhou Hang, Sun Fengming. Fast white light interference signal processing method based on effective signal extraction[J]. Infrared and Laser Engineering, 2019, 48(10): 1013002-1013002(8). doi: 10.3788/IRLA201948.1013002
Citation: Ma Long, Jia Jun, Pei Xin, Hu Yanmin, Zhou Hang, Sun Fengming. Fast white light interference signal processing method based on effective signal extraction[J]. Infrared and Laser Engineering, 2019, 48(10): 1013002-1013002(8). doi: 10.3788/IRLA201948.1013002
shu

Fast white light interference signal processing method based on effective signal extraction

doi: 10.3788/IRLA201948.1013002
  • 1.

    Sino-European Institute of Aviation Engineering,Civil Aviation University of China,Tianjin 300300,China

  • Received Date: 2019-05-05
  • Rev Recd Date: 2019-06-15
  • Publish Date: 2019-10-25
  • Focusing on the measurement efficiency of white light interferometry in vertical large-scale scanning process, a fast white light interference signal processing method based on effective signal extraction was proposed. The bimodal spectrum distribution model of the white LED light source was established, and the simulation experiments were carried out by using this model. From the simulation results, the minimum sampling interval length required by different algorithms at a specific sampling step was given, which reduced data volume without changing the measurement accuracy and allowed the calculation to start before the end of sampling. To eliminate the fluctuation of background value in vertical large-scale scanning process, a background value extraction method based on background set was introduced. By comparing with several signal processing methods, it was proved that the extraction method can effectively eliminate the influence on measurement accuracy. Finally, the proposed method was applied to the self-designed white light interferometer and a U disk interface was tested in using Fourier transform method. The results show that the total time from scanning to obtaining surface height information is reduced by 49.02%.
  • [1] Wu Junjie, Lei Lihua, Chen Xin, et al. A three-dimensional microdisplacement sensing system based on MEMS bulk-silicon technology[J]. Sensors, 2014, 14:20533-20542.
    [2] Spengen W M V. MEMS reliability from a failure mechanisms perspective[J]. Microelectronics Reliability, 2003, 43(7):1049-1060.
    [3] Bojan M, Apostol D, Iordache I, et al. R3 measurement by white light interferometry[C]//Proceedings of SPIE, 2012, 8411(5):1-24.
    [4] Maniscalco B, Kaminski P M, Walls J M. Thin film thickness measurements using scanning white light interferometry[J]. Thin Solid Films, 2014, 550:10-16.
    [5] Dubey V, Singh V, Ahmad A, et al. White light phase shifting interferometry and color fringe analysis for the detection of contaminants in water[C]//Quantitative Phase Imaging II. International Society for Optics and Photonics, 2016.
    [6] Xie Jin, Liu Xuran, Wu Keke, et al. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Optics and Precision Engineering, 2014, 22(2):376-382. (in Chinese)
    [7] Heikkinen V, Kassamakov I, Hggstrm E, et al. Scanning white light interferometry, -A new 3D forensics tool[C]//IEEE International Conference on Technologies for Homeland Security. IEEE, 2011:332-337.
    [8] Zou Wendong, Huang Changhui, Zhen Qiang, et al. Measurement of microscopic surface topography of alloy dimple fracture by scanning white-light interferometry[J]. Optics and Precision Engineering, 2011, 19(7):1612-1619.(in Chinese)
    [9] Bian Y, Guo T, Li F, et al. Large step structure measurement by using white light interferometry based on adaptive scanning[C]//Proceedings of SPIE, 2013, 8759:87594T.
    [10] Popiolek-Masajada A, Urbanczyk W, Pavli?ek P, et al. White-light interferometry with high measurement speed[C]//Proceedings of SPIE, 2014, 9441:944115.
    [11] Pacholik A, Muller M, Fengler W, et al. GPU vs FPGA:example application on white light interferometry[C]//International Conference on Reconfigurable Computing and FPGAS. IEEE, 2011:481-486.
    [12] You J, Kim Y J, Kim S W. GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements[J]. International Journal of Nanomanufacturing, 2012, 8(1/2):31-39.
    [13] Chong W K, Li X, Soh Y C. Spectral effects of dual wavelength low coherence light source in white light interferometry[J]. Optics Lasers in Engineering, 2013, 51(6):651-655.
    [14] Ai C, Novak E L. Centroid approach for estimating modulation peak in broad-bandwidth interferometry:US, US5633715[P]. 1997-05-27.
    [15] Chim S S C, Kino G S. Three-dimensional image realization in interference microscopy[J]. Applied Optics, 1992, 31(14):2550-2553.
    [16] Hart M, Vass D G, Begbie M L. Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy[J]. Applied Optics, 1998, 37(10):1764.
    [17] Groot P D, Lega X C D. Signal modeling for low-coherence height-scanning interference microscopy[J]. Applied Optics, 2004, 43(25):4821-4830.
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索
Get Citation
PDF
XML

Article Metrics

Article views(561) PDF downloads(54) Cited by()

Related
Proportional views

Fast white light interference signal processing method based on effective signal extraction

doi: 10.3788/IRLA201948.1013002
  • 1. Sino-European Institute of Aviation Engineering,Civil Aviation University of China,Tianjin 300300,China
  • Received Date: 2019-05-05
  • Rev Recd Date: 2019-06-15
  • Publish Date: 2019-10-25

Abstract: Focusing on the measurement efficiency of white light interferometry in vertical large-scale scanning process, a fast white light interference signal processing method based on effective signal extraction was proposed. The bimodal spectrum distribution model of the white LED light source was established, and the simulation experiments were carried out by using this model. From the simulation results, the minimum sampling interval length required by different algorithms at a specific sampling step was given, which reduced data volume without changing the measurement accuracy and allowed the calculation to start before the end of sampling. To eliminate the fluctuation of background value in vertical large-scale scanning process, a background value extraction method based on background set was introduced. By comparing with several signal processing methods, it was proved that the extraction method can effectively eliminate the influence on measurement accuracy. Finally, the proposed method was applied to the self-designed white light interferometer and a U disk interface was tested in using Fourier transform method. The results show that the total time from scanning to obtaining surface height information is reduced by 49.02%.

    HTML

Reference (17)

Catalog

    版权所有 © 2019 《红外与激光工程》编辑部｜ Address: 58 Zhonghuan West Road, Tianjin Airport Economic Zone｜ Post Code: 300308

    津ICP备19007885号-1

    Supported by: Beijing Renhe Information Technology Co. Ltd  

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return