Xie Gesa, Wang Hongjun, Wang Dasen, Tian Ailing, Liu Bingcai, Zhu Xueliang, Liu Weiguo. Study on classification and detection of supersmooth surface defects[J]. Infrared and Laser Engineering, 2019, 48(11): 1113003-1113003(7). doi: 10.3788/IRLA201948.1113003
| Citation:
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Xie Gesa, Wang Hongjun, Wang Dasen, Tian Ailing, Liu Bingcai, Zhu Xueliang, Liu Weiguo. Study on classification and detection of supersmooth surface defects[J]. Infrared and Laser Engineering, 2019, 48(11): 1113003-1113003(7). doi: 10.3788/IRLA201948.1113003
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Study on classification and detection of supersmooth surface defects
- 1.
Shaanxi Province Key Laboratory of Membrane Technology and Optical Test,Xi'an Technological University,Xi'an 710021,China;
- 2.
The Ningbo Branch of Ordnance Science Institute of China,Ningbo 310022,China
- Received Date: 2019-07-05
- Rev Recd Date:
2019-08-15
- Publish Date:
2019-11-25
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Abstract
In order to distinguish the scattered light generated by the three defects of micro-particles, sub-surface and micro-roughness existing above the super smooth surface, and to obtain the best region for detecting these three scattering mechanisms, combined the Bidirectional Reflectance Distribution Function (BRDF) with Jones matrix and the polarization coefficients of the three defects were given in the four polarization states ss, sp, ps, pp. On this basis, the relationship between the three defects and scattering azimuth in four polarization states was simulated and analyzed. The results show that these defects could be distinguished by using p-polarized scattering light induced by p-polarized incident light. According to the different relations between the three defects and the variation of scattering azimuth, the best area to distinguish three kinds of defects and its realization methods were given.
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References
|
[1]
|
Yuan Shunshan, Cheng Ziqing, Cheng Guang. Experimental study on the selection of polishing powder during super-smooth polishing progress of glass-ceramic[J]. Optics Optoelectronic Technology, 2015, 13(4):87-90. (in Chinese) |
|
[2]
|
Meng K. Material removal mechanism and experimental research for loose abrasive super-smoothing polishing[D]. Beijing:University of Chinese Academy of Sciences, 2017. (in Chinese) |
|
[3]
|
You Xinghai, Zhang Bin. Influence of optical component quality on signal to noise ratio in infrared optical systems[J].Infrared and laser Engineering, 2018, 47(3):0320004. (in Chinese) |
|
[4]
|
Germer T A, Asmail C C. Polarization of light scattered by microrough surfaces and sunsurface defects[J]. J Opt Soc Am A, 1999, 16(6):1326-1332. |
|
[5]
|
Singh U,Kapoor A. Single layer homogeneous model for surface roughness by polarized light scattering[J]. Optics Laser Technology, 2008, 40(2):3415-3424. |
|
[6]
|
Kurashov V N, Marienko V V, Molebna T V, et al. Polarization changes in coherent electromagnetic radiation scattering by the rough surface[C]//SPIE, 1995, 2647:48-56. |
|
[7]
|
Gong Lei. Study on the composite light scattering from wafer and defect particles and its application[D]. Xi'an:Xidian University, 2011. (in Chinese) |
|
[8]
|
Gao Ming, Song Chong, Gong Lei. Analysis of polarization characteristic about rough surface light scattering based on polarized bidirectional reflectance distribution function[J]. Chinese Journal of Lasers, 2013, 40(12):231-236. (in Chinese) |
|
[9]
|
Zhang Yanjie, Wang Xia, He Si. Polarized properties of rough surfaces based on polarized Bi-directional reflectance distribution function[J]. Acta Optica Sinica, 2018, 38(3):441-447. (in Chinese) |
|
[10]
|
Sung L, Mulholl G W, Germer T A. Polarization of light scattered by spheres on a dielectric film[C]//SPIE, 1999, 3784:296-303. |
|
[11]
|
Zhang Yingge. Study on optical scattering characteristics of surface microstructure for optical elements[D]. Xi'an:Xi'an Technological University, 2017. (in Chinese) |
|
[12]
|
Yuan Yan, Jin Ding, Su Lijuan. Optimization modeling and verfication of bidirectional reflectance distribution function for rough surface[J]. Laser Optoelectronics Progress, 2018, 55(5):402-408. (in Chinese) |
|
[13]
|
Pan Yongqiang. Light scattering properties and characteristics of multilayer optical thin films with microroughness[D].Xi'an:Xidian University, 2009. (in Chinese) |
|
[14]
|
Su Sen. Large optical component surface defects detection[D]. Chengdu:Southwest University of Science and Technology, 2014. (in Chinese) |
|
[15]
|
Zhang Jianhua.The research on the relevant electromagnetic scattering of random rough surface[D]. Wuhan:Huazhong University of Science and Technology, 2012. (in Chinese) |
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