Design and optimization of microwave cavity for preparation of optical diamond film

Li Xiaojing; Zheng Ziyun; Shi Geping; Gao Yongliang

doi:10.3788/IRLA201948.S216001

Two microwave resonant cavity with different structures for preparing optical diamond film materials were designed. The Hill shape reentrant cavity can provide enough space for microwave to resonate inside, helping to excite high-density plasma. The improved structure with tilted up substrate holde can obtain high quality film with less impurity. In the optimization process of the second design, it was found that the transition structure with cone can obtain stronger electric field intensity and higher deposition rate than the direct connection style. Gas supply ways and flow rate were optimized, two kinds of gas supply modes were proposed. Mode I was that gas enter from one center hole on the top of the cavity, and mode Ⅱ was a circular path on the top. The results show that the air inlet way with mode I is favorable for the deposition of uniform film, and the optimal gas flow rate range is 5-10 m/s. The designed microwave cavity can be applied to the preparation of high quality optical diamond film.

Design and optimization of microwave cavity for preparation of optical diamond film

1. Inner Mongolia Metal Material Research Institute,Ningbo 315103,China;

2. Yantai Wanlong Vacuum Metallurgy Co.,LTD,Yantai 264006,China

Received Date: 2019-04-10

Rev Recd Date: 2019-05-20

Publish Date: 2019-09-30

Key words:

Abstract: Two microwave resonant cavity with different structures for preparing optical diamond film materials were designed. The Hill shape reentrant cavity can provide enough space for microwave to resonate inside, helping to excite high-density plasma. The improved structure with tilted up substrate holde can obtain high quality film with less impurity. In the optimization process of the second design, it was found that the transition structure with cone can obtain stronger electric field intensity and higher deposition rate than the direct connection style. Gas supply ways and flow rate were optimized, two kinds of gas supply modes were proposed. Mode I was that gas enter from one center hole on the top of the cavity, and mode Ⅱ was a circular path on the top. The results show that the air inlet way with mode I is favorable for the deposition of uniform film, and the optimal gas flow rate range is 5-10 m/s. The designed microwave cavity can be applied to the preparation of high quality optical diamond film.

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Reference (15)

[1]	Li Yaolong, Li Jianming, Su Xiaoping, et al. Research trends and current status in infrared window and dome materials[J]. Journal of Synthetic Crystals, 2007, 36(4):877-883.
[2]	Dodsona J M, Brandona J R, Dhillona H K, et al. Single crystal and polycrystalline CVD diamond for demanding optical applications[C]//Proc of SPIE, 2011, 8016:80160L.
[3]	Blair D, Cleva F, Man C N. Optical absorption measurements in monocrystal-line sapphire at 1 pm[J]. Optical Materials, 1997, 8:233-236.
[4]	Su Q F, Xia Y B, Wang L J. Optical and electrical properties of different oriented CVD diamond films[J]. Applied Surface Science, 2006, 252:8239-8242.
[5]	Coeu S E, Sussmann R S. Optical, thermal and mechanical properties of CVD diamond[J]. Diamond and Related Materials, 2000, 9:1726-1729.
[6]	Yamada H, Chayahara A, Mokuno Y, et al. Modeling and numerical analyses of microwave plasmas for optimizations of a reactor design and its operating conditions[J]. Diamond and Related Materials, 2005, 14:1776-1779.
[7]	Yamada H, Chayahara A, Mokuno Y, et al. Numerical analysis of power absorption and gas pressure dependence of microwave plasma using a tractable plasma description[J]. Diamond and Related Materials, 2006, 15:1395-1399.
[8]	Silva F, Hassouni K, Bonnin X, et al. Microwave engineering of plasma-assisted CVD reactors for diamond deposition[J]. Journal of Physics:Condensed Matter, 2009, 21:1-16.
[9]	Sun Q, Wang J H, Weng J, et al. Surface structure and electric properties of nitrogen incorporated NCD films[J]. Vacuum,2017,137:155-162.
[10]	Weng J, Liu F, Xiong L W. Deposition of large area uniform diamond films by microwave plasma CVD[J].Vacuum, 2018, 147:134-142.
[11]	Li Y F, An X M, Liu X C, et al. A 915 MHz/75 kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films[J]. Diam Relat Mater, 2017, 78:67-72.
[12]	Su J, Li Y, Liu M D, et al. Revisiting the gas flow rate effect on diamond films deposition with a new dome-shaped cavity type microwave plasma CVD reactor[J]. Diamond and Related Materials, 2017, 73:99-104.
[13]	Xie Yongjun, Wang Peng. The Foundation and Application of Ansoft-HFSS[M]. Xi'an:Xi'an University of Electronic Science and Technology Press, 2007. (in Chinese)
[14]	Ge Debiao, Yan Yubo. Electromagnetic Wave Finite Difference Time Domain Method[M]. 3rd ed. Xi'an:Xi'an University of Electronic Science and Technology Press, 2011. (in Chinese)
[15]	Han Zhanzhong, Wang Jiang, Lan Xiaoping. Examples and Applications of Fluent Fluid Engineering Simulation Calculation[M]. Beijing:Beijing Institute of Technology Press, 2004. (in Chinese)

Design and optimization of microwave cavity for preparation of optical diamond film

doi: 10.3788/IRLA201948.S216001

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