Spherical mirror estimation using phase retrieval wavefront sensor technology

Ma Xinxue; Wang Jianli; Wang Bin

Volume 43 Issue 10

Nov. 2014

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Article Navigation > Infrared and Laser Engineering > 2014 > 43(10): 3428-3433

Ma Xinxue, Wang Jianli, Wang Bin. Spherical mirror estimation using phase retrieval wavefront sensor technology[J]. Infrared and Laser Engineering, 2014, 43(10): 3428-3433.

Citation:

Ma Xinxue, Wang Jianli, Wang Bin. Spherical mirror estimation using phase retrieval wavefront sensor technology[J]. Infrared and Laser Engineering, 2014, 43(10): 3428-3433.

Spherical mirror estimation using phase retrieval wavefront sensor technology

1.
Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

Received Date: 2014-02-11
Rev Recd Date: 2014-03-13
Publish Date: 2014-10-25

Abstract

In order to verify the estimated wavefront ability of the phase retrieval wavefront sensor (PRWS) system, a measured spherical mirror of experiment platform with the method of PRWS was set up, whose structure was simple and there was little affection of the platform and even can be ignored, even use the camera of the imaging system to estimate the whole optical system without changing anything. In order to validate the veracity of PRWS, PRWS measurement results were compared with ZYGO interferometer measurement results, experimental results demonstrate that good agreemented is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so using PRWS technology can effectively estimate the aberration of spherical mirror.
- phase retrieval,
- wavefront sensor,
- spherical mirror,
- Zernike polynomial,
- aberration

References

[1]
[2]	Brady Gregory R, Fienup J R. Improved optical metrology using phase retrieval[C]//Optical Fabrication Testing, 2004, 10: 1-3.
[3]	Yang Huizhen, Gong Chenglong. Phase retrieval for a kind of wavefront sensor based on pupil phase diversity [J]. Acta Optica Sinica, 2011, 31(11): 1112002. (in Chinese) 杨慧珍, 龚成龙. 一种基于瞳面相位差的波前传感器相位恢复[J]. 光学学报, 2011, 31(11): 1112002.
[4]
[5]	Osten W. Some answers to new challenges in optical metrology[C]//SPIE, 2008, 7155: 715503-1-715503-16.
[6]
[7]
[8]	Ohara C M, Faust J A, Lowman A E, et al. Phase retrieval camera optical testing of the advanced mirror system demonstrator [C]//SPIE, 2004, 5487: 1744-1756.
[9]	Gerchberg R W, Saxton W O. A practical algorithm for the determination of phase from image and diffraction phase pictures [J]. Optic, 1972, 35(2): 237-246.
[10]
[11]	Fienup J R. Phase retrieval algorithms:A comparison[J]. Appl Opt, 1982, 21(15): 2758-2769.
[12]
[13]	Fienup J R, Marron J C, Schulz T J, et al. Hubble space telescope characterized by using phase-retrieval algorithms[J]. Appl Opt, 1993, 32(10): 1747-1767.
[14]
[15]
[16]	Dean Bruce H, Aronstein David L, Smith J Scott, et al. Phase retrieval algorithm for JWST flight and testbed telescope[C]//SPIE, 2006, 6265: 1-17.
[17]
[18]	Li Fei, Rao Changhui. Study on phase diversity wavefront sensor[J]. Acta Optica Sinica, 2011, 31(8): 0804001. (in Chinese) 李斐, 饶长辉. 高精度相位波前探测器的数值仿真和实验研究[J]. 光学学报, 2011, 31(8): 0804001.
[19]	Liang Shitong, Yang Jianfeng, Xue Bin. A new phase diversity wave-front error sensing method based on genetic algorithm [J]. Acta Optica Sinica, 2010, 30(4): 1015-1019. (in Chinese) 梁士通, 杨建峰, 薛彬. 基于遗传算法的改进相位差法波前误差传感技术研究[J]. 光学学报, 2010, 30(4): 1015-1019.
[20]
[21]
[22]	Jiang Pengzhi, Ma Haotong, Zou Yongchao, et al. Study of aberration correction in light path of adaptive optical system [J]. Acta Optica Sinica, 2011, 31(12): 1214002. 蒋鹏志, 马浩统, 邹永超, 等. 自适应光学系统内光路的像差校正研究[J]. 光学学报, 2011, 31(12): 1214002.
[23]	Devaney A J, Childlaw R. On the uniqueness question in the problem of phase retrieval from intensity measurement[J]. JOSA A, 1978, 68(10): 1352-1354.
[24]
[25]	Han Bing, Xiao Wen, Pan Feng, et al. Optimization of space sampling distance of phase retrieval algorithm for in-line digital holography[J]. Laser Optoelectronics Progress, 2012, 49: 120903. (in Chinese) 韩冰, 肖文, 潘锋, 等. 同轴数字全息相位恢复算法采样距离优化研究[J]. 激光与光电子学进展, 2012, 49: 120903.
[26]
[27]
[28]	Fu Fuxing, Zhang Bin. Recovery of high frequency phase of laser beam with wavefront distortion[J]. Chinese J Lasers,2011, 38(4): 0402009. (in Chinese) 付福兴, 张彬. 激光束畸变波前高频相位的恢复[J]. 中国激光, 2011, 38(4): 0402009.
[29]
[30]	Brady Gregory R, Fienup J R. Phase retrieval as an optical metrology tool[C]//Optical Fabrication Testing. Topical Meeting of the Optical Society of America, SPIE Technical Digest, 2005, TD03: 139-141.
[31]
[32]	Millerd J E, Wyant J C. Simultaneous phase-shifting Fizeau interferometer, US: 20050046864[P]. 2005.
[33]	Leslie Deck. Vibration-resistant phase-shifting interferometry[J]. Applied Optics, 1996, 35(34): 6655-6662.
[34]
[35]	Burge J H, Wyant J C. Applications of computer-generated holograms for interferometric measurement of large aspheric optics[C]//SPIE, 1995, 2576: 258-269.
[36]
[37]	Reichelt S, Pruss C, Tiziani H J. Absolute interferometric test of aspheres by use of twin computer-generated holograms [J]. Applied Optics, 2003, 42(22): 4468-4479.
[38]
[39]	Sommargren G E, Phillion D W, Campbell E W. Sub-nanometer interferometry for aspheric mirror fabrication[C]//The 9th International Conference on Production Engineering, 1999.
[40]
[41]	Reichelt S, Tiziani H J. Twin-CGHs for absolute calibration in wavefront testing interferometry[J]. Optics Communications, 2003, 220: 23-32.
[42]
[43]
[44]	Ma Xinxue, Wang Jianli, Wang Bin. Study on phase retrieval algorithm[J]. Laser Infrared, 2012, 42(2): 217-221. (in Chinese) 马鑫雪,王建立,王斌. 相位恢复技术算法的探究[J]. 激光与红外, 2012, 42(2): 217-221.
[45]
[46]	Wang Bin, Wang Zongyang, Wu Yuanhao, et al. Calibration of no-common path aberration in AO system using multi-channel phase-diversity wave-front sensing[J]. Opt Precision Eng, 2013, 21(7): 1683-1692. (in Chinese) 王斌, 汪宗洋, 吴元昊, 等. 利用多通道相位差异波前探测法检测自适应光学系统非共光路像差[J]. 光学精密工程, 2013, 21(7): 1683-1692.
[47]
[48]	Wang Jianli, Wang Zongyang, Wang Bin, et al. Image restoration by phase-diverse speckle[J]. Opt Precision Eng, 2011, 19(5): 1165-1170. (in Chinese) 王建立, 汪宗洋, 王斌, 等. 相位差异散斑法图像复原技术[J]. 光学精密工程, 2011, 19(5): 1165-1170.
[49]	Zhao Jinyu, Chen Zhanfang, Wang Bin, et al. Parallelity improvement of object function for phase diversity[J]. Opt Precision Eng, 2012, 20(2): 431-438. (in Chinese) 赵金宇, 陈占芳, 王斌, 等. 相位差异法目标函数并行化改造[J]. 光学精密工程, 2012, 20(2): 431-438.
[50]
[51]
[52]	Wang Bin, Wang Zongyang, Wang Jianli, et al. Phase-diverse speckle imaging with two cameras[J]. Opt Precision Eng, 2011, 19(6): 1384-1390. (in Chinese) 王斌, 汪宗洋, 王建立, 等. 双相机相位差异散斑成像技术[J]. 光学精密工程, 2011, 19(6): 1384-1390.
[53]	Wang Zongyang, Wang Bin, Wu Yuanhao, et al. Calibration of non-common path static aberrations by using phase diversity technology[J]. Acta Optica Sinica, 2012, 32(7): 0701007. (in Chinese) 汪宗洋, 王斌, 吴元昊, 等. 利用相位差异技术校准非共光路静态像差[J]. 光学学报, 2012, 32(7): 0701007.
[54]
[55]	Zhao Jinyu, Wu Yuanhao, Ma Xinxue, et al. Image restoration based on real time wave-front information[J]. Opt Precision Eng, 2012, 20(6): 1350-1356. (in Chinese) 赵金宇, 吴元昊, 马鑫雪, 等. 基于实时波前信息的图像复原[J]. 光学精密工程, 2012, 20(6): 1350-1356.
[56]
[57]	Byrd R H, Lu P, Nocedal J. A limited-memory algorithm for bound-constrained optimization[J]. SIAM Journal on Scientific and Statistical Computing, 1995, 16(5): 1190-1208.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Spherical mirror estimation using phase retrieval wavefront sensor technology

1. Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

Received Date: 2014-02-11

Rev Recd Date: 2014-03-13

Publish Date: 2014-10-25

Key words:

Abstract: In order to verify the estimated wavefront ability of the phase retrieval wavefront sensor (PRWS) system, a measured spherical mirror of experiment platform with the method of PRWS was set up, whose structure was simple and there was little affection of the platform and even can be ignored, even use the camera of the imaging system to estimate the whole optical system without changing anything. In order to validate the veracity of PRWS, PRWS measurement results were compared with ZYGO interferometer measurement results, experimental results demonstrate that good agreemented is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so using PRWS technology can effectively estimate the aberration of spherical mirror.

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Reference (57)

[1]
[2]	Brady Gregory R, Fienup J R. Improved optical metrology using phase retrieval[C]//Optical Fabrication Testing, 2004, 10: 1-3.
[3]	Yang Huizhen, Gong Chenglong. Phase retrieval for a kind of wavefront sensor based on pupil phase diversity [J]. Acta Optica Sinica, 2011, 31(11): 1112002. (in Chinese) 杨慧珍, 龚成龙. 一种基于瞳面相位差的波前传感器相位恢复[J]. 光学学报, 2011, 31(11): 1112002.
[4]
[5]	Osten W. Some answers to new challenges in optical metrology[C]//SPIE, 2008, 7155: 715503-1-715503-16.
[6]
[7]
[8]	Ohara C M, Faust J A, Lowman A E, et al. Phase retrieval camera optical testing of the advanced mirror system demonstrator [C]//SPIE, 2004, 5487: 1744-1756.
[9]	Gerchberg R W, Saxton W O. A practical algorithm for the determination of phase from image and diffraction phase pictures [J]. Optic, 1972, 35(2): 237-246.
[10]
[11]	Fienup J R. Phase retrieval algorithms:A comparison[J]. Appl Opt, 1982, 21(15): 2758-2769.
[12]
[13]	Fienup J R, Marron J C, Schulz T J, et al. Hubble space telescope characterized by using phase-retrieval algorithms[J]. Appl Opt, 1993, 32(10): 1747-1767.
[14]
[15]
[16]	Dean Bruce H, Aronstein David L, Smith J Scott, et al. Phase retrieval algorithm for JWST flight and testbed telescope[C]//SPIE, 2006, 6265: 1-17.
[17]
[18]	Li Fei, Rao Changhui. Study on phase diversity wavefront sensor[J]. Acta Optica Sinica, 2011, 31(8): 0804001. (in Chinese) 李斐, 饶长辉. 高精度相位波前探测器的数值仿真和实验研究[J]. 光学学报, 2011, 31(8): 0804001.
[19]	Liang Shitong, Yang Jianfeng, Xue Bin. A new phase diversity wave-front error sensing method based on genetic algorithm [J]. Acta Optica Sinica, 2010, 30(4): 1015-1019. (in Chinese) 梁士通, 杨建峰, 薛彬. 基于遗传算法的改进相位差法波前误差传感技术研究[J]. 光学学报, 2010, 30(4): 1015-1019.
[20]
[21]
[22]	Jiang Pengzhi, Ma Haotong, Zou Yongchao, et al. Study of aberration correction in light path of adaptive optical system [J]. Acta Optica Sinica, 2011, 31(12): 1214002. 蒋鹏志, 马浩统, 邹永超, 等. 自适应光学系统内光路的像差校正研究[J]. 光学学报, 2011, 31(12): 1214002.
[23]	Devaney A J, Childlaw R. On the uniqueness question in the problem of phase retrieval from intensity measurement[J]. JOSA A, 1978, 68(10): 1352-1354.
[24]
[25]	Han Bing, Xiao Wen, Pan Feng, et al. Optimization of space sampling distance of phase retrieval algorithm for in-line digital holography[J]. Laser Optoelectronics Progress, 2012, 49: 120903. (in Chinese) 韩冰, 肖文, 潘锋, 等. 同轴数字全息相位恢复算法采样距离优化研究[J]. 激光与光电子学进展, 2012, 49: 120903.
[26]
[27]
[28]	Fu Fuxing, Zhang Bin. Recovery of high frequency phase of laser beam with wavefront distortion[J]. Chinese J Lasers,2011, 38(4): 0402009. (in Chinese) 付福兴, 张彬. 激光束畸变波前高频相位的恢复[J]. 中国激光, 2011, 38(4): 0402009.
[29]
[30]	Brady Gregory R, Fienup J R. Phase retrieval as an optical metrology tool[C]//Optical Fabrication Testing. Topical Meeting of the Optical Society of America, SPIE Technical Digest, 2005, TD03: 139-141.
[31]
[32]	Millerd J E, Wyant J C. Simultaneous phase-shifting Fizeau interferometer, US: 20050046864[P]. 2005.
[33]	Leslie Deck. Vibration-resistant phase-shifting interferometry[J]. Applied Optics, 1996, 35(34): 6655-6662.
[34]
[35]	Burge J H, Wyant J C. Applications of computer-generated holograms for interferometric measurement of large aspheric optics[C]//SPIE, 1995, 2576: 258-269.
[36]
[37]	Reichelt S, Pruss C, Tiziani H J. Absolute interferometric test of aspheres by use of twin computer-generated holograms [J]. Applied Optics, 2003, 42(22): 4468-4479.
[38]
[39]	Sommargren G E, Phillion D W, Campbell E W. Sub-nanometer interferometry for aspheric mirror fabrication[C]//The 9th International Conference on Production Engineering, 1999.
[40]
[41]	Reichelt S, Tiziani H J. Twin-CGHs for absolute calibration in wavefront testing interferometry[J]. Optics Communications, 2003, 220: 23-32.
[42]
[43]
[44]	Ma Xinxue, Wang Jianli, Wang Bin. Study on phase retrieval algorithm[J]. Laser Infrared, 2012, 42(2): 217-221. (in Chinese) 马鑫雪,王建立,王斌. 相位恢复技术算法的探究[J]. 激光与红外, 2012, 42(2): 217-221.
[45]
[46]	Wang Bin, Wang Zongyang, Wu Yuanhao, et al. Calibration of no-common path aberration in AO system using multi-channel phase-diversity wave-front sensing[J]. Opt Precision Eng, 2013, 21(7): 1683-1692. (in Chinese) 王斌, 汪宗洋, 吴元昊, 等. 利用多通道相位差异波前探测法检测自适应光学系统非共光路像差[J]. 光学精密工程, 2013, 21(7): 1683-1692.
[47]
[48]	Wang Jianli, Wang Zongyang, Wang Bin, et al. Image restoration by phase-diverse speckle[J]. Opt Precision Eng, 2011, 19(5): 1165-1170. (in Chinese) 王建立, 汪宗洋, 王斌, 等. 相位差异散斑法图像复原技术[J]. 光学精密工程, 2011, 19(5): 1165-1170.
[49]	Zhao Jinyu, Chen Zhanfang, Wang Bin, et al. Parallelity improvement of object function for phase diversity[J]. Opt Precision Eng, 2012, 20(2): 431-438. (in Chinese) 赵金宇, 陈占芳, 王斌, 等. 相位差异法目标函数并行化改造[J]. 光学精密工程, 2012, 20(2): 431-438.
[50]
[51]
[52]	Wang Bin, Wang Zongyang, Wang Jianli, et al. Phase-diverse speckle imaging with two cameras[J]. Opt Precision Eng, 2011, 19(6): 1384-1390. (in Chinese) 王斌, 汪宗洋, 王建立, 等. 双相机相位差异散斑成像技术[J]. 光学精密工程, 2011, 19(6): 1384-1390.
[53]	Wang Zongyang, Wang Bin, Wu Yuanhao, et al. Calibration of non-common path static aberrations by using phase diversity technology[J]. Acta Optica Sinica, 2012, 32(7): 0701007. (in Chinese) 汪宗洋, 王斌, 吴元昊, 等. 利用相位差异技术校准非共光路静态像差[J]. 光学学报, 2012, 32(7): 0701007.
[54]
[55]	Zhao Jinyu, Wu Yuanhao, Ma Xinxue, et al. Image restoration based on real time wave-front information[J]. Opt Precision Eng, 2012, 20(6): 1350-1356. (in Chinese) 赵金宇, 吴元昊, 马鑫雪, 等. 基于实时波前信息的图像复原[J]. 光学精密工程, 2012, 20(6): 1350-1356.
[56]
[57]	Byrd R H, Lu P, Nocedal J. A limited-memory algorithm for bound-constrained optimization[J]. SIAM Journal on Scientific and Statistical Computing, 1995, 16(5): 1190-1208.

Spherical mirror estimation using phase retrieval wavefront sensor technology

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References

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