Volume 44 Issue 1
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Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254-259.
Citation: Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254-259.

Key technology for fiber phase-shifting point diffraction interferometer

  • Received Date: 2014-05-08
  • Rev Recd Date: 2014-06-03
  • Publish Date: 2015-01-25
  • In order to measure the wavefront aberration of optical system with the high accuracy, the improved fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the parameters of the key components of the interferometer including laser source and fiber were selected and analyzed. After the test, the laser power stability was about 1%(10 min), the spot size was in the allowable range of the optimum coupling efficiency, the beam position stability was about 6 um, the coherence length was about 1 cm, the above were all in the allowable range of testing accuracy; No polarization-maintaining single-mode fiber was selected, its core diameter was 3.5 um, the fiber endface was coated transflective metal film, the high fringe contrast and light energy utilization were realized, and the wavefront reference source was designed, it's convenient for the polishing, coating and clamping of fiber endface. Finally, the selected components were used to build experimental device of fiber phase-shifting point diffraction interferometer, above works provide preparation for ultimately achieving high accuracy test of the wavefront aberration of optical system.
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    [2] He Yong, Chen Lei, Wang Qing, et al. Twyman-Green infrared phase-shifting interferometer and application [J]. Infrared and Laser Engineering, 2003, 32(4): 335-338. (in Chinese)
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    [4] Otaki, Yamamoto T, Fukuda Y,et al. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror [J]. J Vac Sci Technol B, 2002, 20(1): 295-300.
    [5] Otaki K, Ota K, Nishiyama I, et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation [J]. J Vac Sci Technol B, 2002, 20(6): 2449-2457.
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    [8] Kazuya Ota, Tokahiro Yamamoto, Yusuke Fukuda, et al. Advanced point diffraction interferometer for EUV aspherical mirrors[C]//SPIE, 2001, 4343: 543-550.
    [9] Lu Zengxiong, Jin Chunshui, Zhang Lichao et al. Wave-Front quality analysis of three-dimension pinhole vector diffractional in extreme ultraviolet region [J]. Acta Optica Sinica, 2010, 30(10): 2849-2854. (in Chinese)
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    [11] Nie Liang, Han Jun, Yu Xun, et al. Phase shifting interferograms processing for fiber point-diffraction interferometer[C]//SPIE, 2008, 7155: 71551G.
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    [13] Sommargren Gary E, Phillion Donald W, Johnson Michael A, et al. 100-picometer interferometry for EUVL[C]//SPIE, 2002, 4688: 316-328.
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    [15] Seiji Takeuchi, Osamu Kakuchi, Kenji Yamazoe, et al. Visible light point-diffraction interferometer for testing of EUVL optics[C]//SPIE, 2006, 6151: 61510E.
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    [18] Johnson Michael A, Phillion Donald W, Sommargren Gary E, et al. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[C]//SPIE, 2005, 5869: 58690P.
    [19] Zhang Yu, Jin Chunshui, Ma Dongmei, et al. Measuring technology for wavefront aberration of EUVL objective system [J]. Infrared and Laser Engineering,2012, 41(12): 3384-3389. (in Chinese)
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Key technology for fiber phase-shifting point diffraction interferometer

  • 1. College of Science,Northeast Dianli University,Changchun 132012,China;
  • 2. State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

Abstract: In order to measure the wavefront aberration of optical system with the high accuracy, the improved fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the parameters of the key components of the interferometer including laser source and fiber were selected and analyzed. After the test, the laser power stability was about 1%(10 min), the spot size was in the allowable range of the optimum coupling efficiency, the beam position stability was about 6 um, the coherence length was about 1 cm, the above were all in the allowable range of testing accuracy; No polarization-maintaining single-mode fiber was selected, its core diameter was 3.5 um, the fiber endface was coated transflective metal film, the high fringe contrast and light energy utilization were realized, and the wavefront reference source was designed, it's convenient for the polishing, coating and clamping of fiber endface. Finally, the selected components were used to build experimental device of fiber phase-shifting point diffraction interferometer, above works provide preparation for ultimately achieving high accuracy test of the wavefront aberration of optical system.

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