Volume 44 Issue 8
Sep.  2015
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Article Navigation >  Infrared and Laser Engineering  > 2015  >  44(8): 2280-2285

He Yang, Lu Jun, Chen Fei, Li Dianjun, Zheng Changbin, Xie Jijiang, Guo Jin. Experimental researches on acousto-optic Q-switched CO2 laser[J]. Infrared and Laser Engineering, 2015, 44(8): 2280-2285.
Citation: He Yang, Lu Jun, Chen Fei, Li Dianjun, Zheng Changbin, Xie Jijiang, Guo Jin. Experimental researches on acousto-optic Q-switched CO2 laser[J]. Infrared and Laser Engineering, 2015, 44(8): 2280-2285.
shu

Experimental researches on acousto-optic Q-switched CO2 laser

  • 1.

    State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;

  • 2.

    The Second Artillery Equipment Academy,Beijing 100085,China

  • Received Date: 2014-12-05
  • Rev Recd Date: 2015-01-03
  • Publish Date: 2015-08-25
  • In order to meet the demand of 13.5-nm extreme ultraviolet lithography (EUVL), an acousto-optically Q-switched CO2 laser was developed, which has high repetition rate and high stability. First, the operating principle of the acousto-optic Q-switch was analyzed and the relationship between the voltage of modulated signal and diffraction efficiency was researched experimentally. And then, by studying the influence of modulated signal duty cycle on pulse waveform, the appropriate duty cycle was chosen to eliminate the pulse tail. Under the conditions of different repetition rates, pulse duration, power and the pulse amplitude stability were measured and analyzed. Finally, the beam pointing stability of the laser was measured. Experimental results indicate that the range of pulse repetition rate can be adjusted from 1 kHz to 100 kHz. When the repetition rate is 1 kHz, the minimum pulse duration is 252 ns and the maximum peak power reaches 7 579 W. By designing the support frames mainly made of invar steel, the unstablity of pulse amplitude is less than 3% and the beam pointing stability is only 46.6 rad. This acousto-optic Q-switched CO2 laser is suitable for a seed source used in EUVL.
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    [2] Wu B, Kumar A. Extreme ultraviolet lithography and three dimensional integrated circuit-a review [J]. Applied Physics Reviews-Focused Review, 2014(1): 011104.
    [3] Brandt D C, Fomenkov I V, Farrar N R, et al. CO2/Sn LPP EUV Sources for device development and HVM [C]//Conference on Extreme Ultraviolet(EUV) Lithography IV, 2013: 8679: 86791G.
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    [5] Ohta T, Nowak K M, Suganuma T, et al. Development of the reliable high power pulsed carbon dioxide laser system for LPP EUV light source[C]//Conference on Extreme Ultraviolet (EUV) Lithography III, 2012: 8322: 83222O.
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    [7] Xie Jinjiang, Li Dianjun, Zhang Chuansheng, et al. Acousto-optically Q-switched CO2 laser [J]. Optics and Precision Engineering, 2009, 17(5): 1008-1013. (in Chinese)谢冀江, 李殿军, 张传胜, 等. 声光调Q CO2激光器[J]. 光学 精密工程, 2009, 17(5): 1008-1013.
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    [11] Wang Yunfei, Wu Jin, Liu Shiming, et al. Tunable characteristic of long pulse TE CO2 laser [J]. Infrared and Laser Engineering, 2008, 37(2): 226-229. (in Chinese)王云飞, 吴谨, 刘世明, 等. 长脉冲TE CO2激光器的调谐特性[J]. 红外与激光工程, 2008, 37(2): 226-229.
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    [13] Zheng Yijun, Tan Rongqing, Wang Donglei, et al. Novel high repetition-rate pulse CO2 laser[J]. Infrared and Laser Engineering, 2013, 42(10): 2697-2701. (in Chinese)郑义军, 谭荣清, 王东雷, 等. 新型高重复频率脉冲CO2激光器[J]. 红外与激光工程, 2013, 42(10): 2697-2701.
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    [16] Zhang Y C, Tian Z S, Sun Z H, et al. High pulse repetition frequency RF excited waveguide CO2 laser with mechanical Q-switching[J]. Infrared Physics Technology, 2013, 58: 12-14.
    [17] Zhang Y C, Tian Z S, Sun Z H, et al. Study of frequency stabilization for electro-optical Q-switched radio-frequency-excited waveguide CO2 laser using build-up time method [J]. Applied Optics, 2013, 52(16): 3732-3736.
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    [20] Xie J J, Guo R H, Li D J, et al. Theoretical calculation and experimental study of acousto-optically Q-switched CO2 laser [J]. Optics Express, 2010, 18(12): 12371-12380.
    [21] Ge Ruirong, Dong Xiangqun, Lin Peihui, et al. Analysis on argon arc welding process and properties of dissimilar metal stainless steel-invar[J]. Hot Working Technology, 2014, 43(13): 201-202. (in Chinese)葛瑞荣, 董向群, 林培辉, 等. 不锈钢-殷钢异种金属弧焊接工艺及性能分析[J]. 热加工工艺, 2014, 43(13): 201-202.
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    [23] Wang Gang, Wang Shiyu, Cai Defang, et al. Study on the effect of diffraction efficiency on pulse compression of A-O Q-switched laser [J]. Acta Photonica Sinica, 2006, 35(1): 13-15. (in Chinese)王刚, 王石语, 蔡德芳, 等. 声光调Q衍射效率对脉宽压缩的影响研究[J]. 光子学报, 2006, 35(1): 13-15.
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Experimental researches on acousto-optic Q-switched CO2 laser

  • 1. State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;
  • 2. The Second Artillery Equipment Academy,Beijing 100085,China
  • Received Date: 2014-12-05
  • Rev Recd Date: 2015-01-03
  • Publish Date: 2015-08-25

Abstract: In order to meet the demand of 13.5-nm extreme ultraviolet lithography (EUVL), an acousto-optically Q-switched CO2 laser was developed, which has high repetition rate and high stability. First, the operating principle of the acousto-optic Q-switch was analyzed and the relationship between the voltage of modulated signal and diffraction efficiency was researched experimentally. And then, by studying the influence of modulated signal duty cycle on pulse waveform, the appropriate duty cycle was chosen to eliminate the pulse tail. Under the conditions of different repetition rates, pulse duration, power and the pulse amplitude stability were measured and analyzed. Finally, the beam pointing stability of the laser was measured. Experimental results indicate that the range of pulse repetition rate can be adjusted from 1 kHz to 100 kHz. When the repetition rate is 1 kHz, the minimum pulse duration is 252 ns and the maximum peak power reaches 7 579 W. By designing the support frames mainly made of invar steel, the unstablity of pulse amplitude is less than 3% and the beam pointing stability is only 46.6 rad. This acousto-optic Q-switched CO2 laser is suitable for a seed source used in EUVL.

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