Final optics damage online inspection system for ICF

Feng Bo; Liu Bingguo; Chen Fengdong; Liu Guodong; Peng Zhitao; Yuan Haoyu; Sun Heyi

Volume 42 Issue 9

Feb. 2014

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Article Navigation > Infrared and Laser Engineering > 2013 > 42(9): 2519-2524

Feng Bo, Liu Bingguo, Chen Fengdong, Liu Guodong, Peng Zhitao, Yuan Haoyu, Sun Heyi. Final optics damage online inspection system for ICF[J]. Infrared and Laser Engineering, 2013, 42(9): 2519-2524.

Citation:

Feng Bo, Liu Bingguo, Chen Fengdong, Liu Guodong, Peng Zhitao, Yuan Haoyu, Sun Heyi. Final optics damage online inspection system for ICF[J]. Infrared and Laser Engineering, 2013, 42(9): 2519-2524.

Final optics damage online inspection system for ICF

1.
School of Electrical Engineering and Automation,Harbin Institute of Technology,Harbin 150001,China;
2.
The Laser Fusion Research Center,China Academy of Engineering Physics,Mianyang 621900,China

Received Date: 2013-01-11
Rev Recd Date: 2013-02-12
Publish Date: 2013-09-25

Abstract

Final optics play an important role in Inertial Confinement Fusion (ICF) system. In this paper, the online inspection technology for final optics damage was studied in order to build a final optics damage online inspection system for ShenGuang-Ⅲ(SG-Ⅲ) prototype device. According to the assignment of final optics in optical module, a zoom telescope optical system with high resolution was designed by CODEV to meet the testing requirement. Based on the assignment of optical modules in target chamber, the positioning mechanism was designed to focus and switch the beamlines and the optics accurately and rapidly. At last, an off-line simulation experiment based on SG-Ⅲ was carried out. The result shows that the MTF at the spatial frequency of 68 lp/mm is greater than 0.4, 80% of the energy is distributed within 22 CCD cells. Between 1.8 m to 2.8 m, the resolution of the optical detecting mechanism can reach 160 m. The defects can be tracked when their diameter is up to 60 m by image processing method. The precision of the positioning mechanism is better than 13 arc sec.
- on-line inspection,
- final optics,
- zoom optical system

References

[1]	Duan Lihua, Zhang Wenghui, Hu Jianping. et al. Study of growth of laser initiated damage in fused silica at 3[J]. Laser Journal, 2005, 26(2): 23-25. (in Chinese) 段利华, 张问辉, 胡建平, 等. 3激光辐照下熔石英的损伤增长研究[J]. 激光杂志, 2005, 26(2): 23-25.
[2]
[3]	Hu Jianping, Ma Ping, Xu Qiao. Laser damage threshold measurement of the optical elements[J]. Infrared and Laser Engineering, 2006, 35(2): 187-191. (in Chinese) 胡建平, 马平, 许乔. 光学元件的激光损伤阈值测量[J]. 红外与激光工程, 2006, 35(2): 187-191.
[4]
[5]	Salmon J T, Brase J M, Bliss E S, et al. Laser damage inspection final report[R]. California: Lawrence Livermore National Laboratory, 2001.
[6]
[7]	Wang Xue, Xie Zhijiang, Sun Hongyan, et al. Study on automatic flaw inspection system for large caliber precision optical surface[J]. Chinese Journal of Scientific Instrument, 2006, 27(10): 1262-1265. (in Chinese) 王雪, 谢志江, 孙红岩, 等. 大口径精密光学元件表面疵病检测系统研究[J]. 仪器仪表学报, 2006, 27(10): 1262-1265.
[8]
[9]	Liu Xu, Yang Yongying, Liu Dong, et al. Error analysis of sub-aperture synthesis for detecting surface defects of optical components[J]. Journal of OptoelectronicsLaser, 2008, 19(8):1088-1093. (in Chinese) 刘旭, 杨甬英, 刘东, 等. 光学元件表面疵病检测扫描拼接的误差分析[J]. 光电子激光, 2008, 19(8): 1088-1093.
[10]
[11]	Tian Ailing, Dang Juanjuan, Wang Chunhui, et al. Optical subsurface damage detection and its analysis[J]. Journal of Xi'an Technological University, 2011, 31(1): 24-28. (in Chinese) 田爱玲, 党娟娟, 王春慧, 等. 光学元件亚表层损伤检测和规律研究[J]. 西安工业大学学报, 2011, 31(1): 24-28.
[12]
[13]
[14]	Deng Yan, Xu Qiao, Chai Liqun, et al. Total internal reflection microscopy[J]. High Power Laser and Particle Beams, 2009, 21(6): 835-840. (in Chinese) 邓燕, 许乔, 柴立群, 等. 光学元件亚表面缺陷的全内反射显微检测[J]. 强激光与粒子束, 2009, 21(6): 835-840.
[15]	Conder A, Alger T, Azevedo S, et al. Final optics damage inspection(FODI) for the National Ignition Facility[C]//Optics and Photonics for Information Process IV, 2010: 77970.
[16]
[17]	Lin Dongdong, Cao Yiping, Li Dahai. On-line damage detecting system of multiple large-scale optical components at Brewster's angle[J]. High Power Laser and Particle Beams, 2007, 19(7): 1093-1097. (in Chinese) 林冬冬, 曹益平, 李大海. 多个布儒斯特窗大型光学元件的损伤在线检测[J]. 强激光与粒子束, 2007, 19(7): 1093-1097.
[18]
[19]	Ren Bingqiang, Huang Huijie, Zhang Weixin, et al. Online inspection apparatus and experiments on optics damage[J]. High Power Laser and Particle Beams, 2004, 16(4): 465-468. (in Chinese) 任冰强, 黄惠杰, 张维新, 等. 光学元件损伤在线检测装置及实验研究[J]. 强激光与粒子束, 2004, 16(4): 465-468.
[20]
[21]	Xu Longbo, Peng Zhitao, Sun Zhihong. et al. Damage online inspection technology of driver terminal optical elements[J]. Infrared and Laser Engineering, 2009, 38(4): 721-724. (in Chinese) 徐隆波, 彭志涛, 孙志红, 等. 驱动器终端光学组件损伤在线检测技术[J]. 红外与激光工程, 2009, 38(4): 721-724.
[22]
[23]
[24]	Peng Zhitao, Wei Xiaofeng, Yuan Haoyu. et al. Signal noise ratio of total internal reflection edge illumination for optics damage inspection[J]. Infrared and Laser Engineering, 2011, 40(6): 1111-1114. (in Chinese) 彭志涛, 魏晓峰, 元浩宇, 等. 全内反射照明光学元件损伤检测信噪比分析[J]. 红外与激光工程, 2011, 40(6): 1111-1114.
[25]	Yang Le, Sun Qiang, Wang Jian, et al. Design of long-wave infrared continuous zoom optical system[J]. Infrared and Laser Engineering, 2012, 41(4): 999-1004. (in Chinese) 杨乐, 孙强, 王健, 等. 长波红外连续变焦光学系统设计[J]. 红外与激光工程, 2012, 41(4): 999-1004.
[26]
[27]
[28]	Liu Wei, Wang Yongtian, Chen Jing, et al. Tracking algorithm for zoom camera based on compensation matrix[J]. Infrared and Laser Engineering, 2011, 40(1): 159-168. (in Chinese) 刘伟, 王涌天, 陈靖, 等. 利用补偿矩阵的可变焦摄像机跟踪算法[J]. 红外与激光工程, 2011, 40(1): 159-168.
[29]	Li Lingyin, Wang Yifan. Error analysis for varifocal optical system[J]. Infrared and Laser Engineering, 2012, 41(5): 1329-1334. (in Chinese) 李零印, 王一凡. 变焦系统误差分析[J]. 红外与激光工程, 2012, 41(5): 1329-1334.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Final optics damage online inspection system for ICF

1. School of Electrical Engineering and Automation,Harbin Institute of Technology,Harbin 150001,China;

2. The Laser Fusion Research Center,China Academy of Engineering Physics,Mianyang 621900,China

Received Date: 2013-01-11

Rev Recd Date: 2013-02-12

Publish Date: 2013-09-25

Key words:

Abstract: Final optics play an important role in Inertial Confinement Fusion (ICF) system. In this paper, the online inspection technology for final optics damage was studied in order to build a final optics damage online inspection system for ShenGuang-Ⅲ(SG-Ⅲ) prototype device. According to the assignment of final optics in optical module, a zoom telescope optical system with high resolution was designed by CODEV to meet the testing requirement. Based on the assignment of optical modules in target chamber, the positioning mechanism was designed to focus and switch the beamlines and the optics accurately and rapidly. At last, an off-line simulation experiment based on SG-Ⅲ was carried out. The result shows that the MTF at the spatial frequency of 68 lp/mm is greater than 0.4, 80% of the energy is distributed within 22 CCD cells. Between 1.8 m to 2.8 m, the resolution of the optical detecting mechanism can reach 160 m. The defects can be tracked when their diameter is up to 60 m by image processing method. The precision of the positioning mechanism is better than 13 arc sec.

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Reference (29)

[1]	Duan Lihua, Zhang Wenghui, Hu Jianping. et al. Study of growth of laser initiated damage in fused silica at 3[J]. Laser Journal, 2005, 26(2): 23-25. (in Chinese) 段利华, 张问辉, 胡建平, 等. 3激光辐照下熔石英的损伤增长研究[J]. 激光杂志, 2005, 26(2): 23-25.
[2]
[3]	Hu Jianping, Ma Ping, Xu Qiao. Laser damage threshold measurement of the optical elements[J]. Infrared and Laser Engineering, 2006, 35(2): 187-191. (in Chinese) 胡建平, 马平, 许乔. 光学元件的激光损伤阈值测量[J]. 红外与激光工程, 2006, 35(2): 187-191.
[4]
[5]	Salmon J T, Brase J M, Bliss E S, et al. Laser damage inspection final report[R]. California: Lawrence Livermore National Laboratory, 2001.
[6]
[7]	Wang Xue, Xie Zhijiang, Sun Hongyan, et al. Study on automatic flaw inspection system for large caliber precision optical surface[J]. Chinese Journal of Scientific Instrument, 2006, 27(10): 1262-1265. (in Chinese) 王雪, 谢志江, 孙红岩, 等. 大口径精密光学元件表面疵病检测系统研究[J]. 仪器仪表学报, 2006, 27(10): 1262-1265.
[8]
[9]	Liu Xu, Yang Yongying, Liu Dong, et al. Error analysis of sub-aperture synthesis for detecting surface defects of optical components[J]. Journal of OptoelectronicsLaser, 2008, 19(8):1088-1093. (in Chinese) 刘旭, 杨甬英, 刘东, 等. 光学元件表面疵病检测扫描拼接的误差分析[J]. 光电子激光, 2008, 19(8): 1088-1093.
[10]
[11]	Tian Ailing, Dang Juanjuan, Wang Chunhui, et al. Optical subsurface damage detection and its analysis[J]. Journal of Xi'an Technological University, 2011, 31(1): 24-28. (in Chinese) 田爱玲, 党娟娟, 王春慧, 等. 光学元件亚表层损伤检测和规律研究[J]. 西安工业大学学报, 2011, 31(1): 24-28.
[12]
[13]
[14]	Deng Yan, Xu Qiao, Chai Liqun, et al. Total internal reflection microscopy[J]. High Power Laser and Particle Beams, 2009, 21(6): 835-840. (in Chinese) 邓燕, 许乔, 柴立群, 等. 光学元件亚表面缺陷的全内反射显微检测[J]. 强激光与粒子束, 2009, 21(6): 835-840.
[15]	Conder A, Alger T, Azevedo S, et al. Final optics damage inspection(FODI) for the National Ignition Facility[C]//Optics and Photonics for Information Process IV, 2010: 77970.
[16]
[17]	Lin Dongdong, Cao Yiping, Li Dahai. On-line damage detecting system of multiple large-scale optical components at Brewster's angle[J]. High Power Laser and Particle Beams, 2007, 19(7): 1093-1097. (in Chinese) 林冬冬, 曹益平, 李大海. 多个布儒斯特窗大型光学元件的损伤在线检测[J]. 强激光与粒子束, 2007, 19(7): 1093-1097.
[18]
[19]	Ren Bingqiang, Huang Huijie, Zhang Weixin, et al. Online inspection apparatus and experiments on optics damage[J]. High Power Laser and Particle Beams, 2004, 16(4): 465-468. (in Chinese) 任冰强, 黄惠杰, 张维新, 等. 光学元件损伤在线检测装置及实验研究[J]. 强激光与粒子束, 2004, 16(4): 465-468.
[20]
[21]	Xu Longbo, Peng Zhitao, Sun Zhihong. et al. Damage online inspection technology of driver terminal optical elements[J]. Infrared and Laser Engineering, 2009, 38(4): 721-724. (in Chinese) 徐隆波, 彭志涛, 孙志红, 等. 驱动器终端光学组件损伤在线检测技术[J]. 红外与激光工程, 2009, 38(4): 721-724.
[22]
[23]
[24]	Peng Zhitao, Wei Xiaofeng, Yuan Haoyu. et al. Signal noise ratio of total internal reflection edge illumination for optics damage inspection[J]. Infrared and Laser Engineering, 2011, 40(6): 1111-1114. (in Chinese) 彭志涛, 魏晓峰, 元浩宇, 等. 全内反射照明光学元件损伤检测信噪比分析[J]. 红外与激光工程, 2011, 40(6): 1111-1114.
[25]	Yang Le, Sun Qiang, Wang Jian, et al. Design of long-wave infrared continuous zoom optical system[J]. Infrared and Laser Engineering, 2012, 41(4): 999-1004. (in Chinese) 杨乐, 孙强, 王健, 等. 长波红外连续变焦光学系统设计[J]. 红外与激光工程, 2012, 41(4): 999-1004.
[26]
[27]
[28]	Liu Wei, Wang Yongtian, Chen Jing, et al. Tracking algorithm for zoom camera based on compensation matrix[J]. Infrared and Laser Engineering, 2011, 40(1): 159-168. (in Chinese) 刘伟, 王涌天, 陈靖, 等. 利用补偿矩阵的可变焦摄像机跟踪算法[J]. 红外与激光工程, 2011, 40(1): 159-168.
[29]	Li Lingyin, Wang Yifan. Error analysis for varifocal optical system[J]. Infrared and Laser Engineering, 2012, 41(5): 1329-1334. (in Chinese) 李零印, 王一凡. 变焦系统误差分析[J]. 红外与激光工程, 2012, 41(5): 1329-1334.

Final optics damage online inspection system for ICF

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