Abstract: When the reflection mirror component is assembled for topography measurement, the manufacturing tolerance of parts, including dimensional tolerance, contour tolerance could cause assembling stress, which induces to descend of surface figure accuracy. In order to resolve the problem, a method of applying flexure hinge in the design of reflection mirror component measurement tooling was proposed. To verify its reliability, using flexure hinge theory and finite element analysis software, considering the characteristic parameters and verifying method of the reflection mirror component, the reflection mirror topography measurement tooling was designed and manufactured. The reflection mirror component repetition topography measurement, the sensitivity tightening torque topography measurement test were taken respectively, which proved that the flexure tooling has well stability. Compared with the single reflection mirror, the surface figure of component changed 0.006 rms, which satisfied the requirement of tooling design. Using flexure hinge in reflection mirror component topography measurement is better in reducing assembling stress than rigidity tooling.