Abstract: In order to reduce the surface scattering loss of optical thin film, the expression of interface roughness scattering field in the incident medium was given by electromagnetic field boundary conditions, without considering the effect of multiple scattering. The conditions of zero scattering and anti-scattering of single layer optical thin film were discussed. The theoretical results show that when the optical thickness of the film is an even time of /4, the refractive ratio of the single layer thin film must be bigger than the substrate refractive ratio so as to realize anti-scattering, and the air-film micro-roughness must be smaller than the film-substrate interface micro-roughness, when the optical thickness of the thin film is /4 an odd number of times, single layer optical thin film to realize anti-scattering must be single-layer thin film refractive index is less than the substrate refractive index, and the air-film micro-roughness must be satisfy certain conditions.