基于MEMS的红外动态图像生成技术
Infrared dynamic scenes generating technique based on MEMS
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摘要: 提出了一种基于MEMS技术的红外动态图像生成技术。利用热传导方程,建立了可见光/红外图像转换膜的理论模型;介绍了可见光/红外图像转换膜制作的工艺流程,制作了一张像元数为512512、像元尺寸为35m的可见光/红外图像转换膜。并利用转换膜构造了红外动态图像生成装置,通过实验对红外动态图像生成装置的性能进行了研究。利用MEMS技术制作的可见光/红外图像转换膜可以工作在红外3~5m和8~12m两个波段。根据实验测得红外图像生成装置的空间分辨率为14 lp/mm,在3~5m波段,所生成红外图像的温度范围为250~440 K,在8~12m波段,所生成红外图像的温度范围为250~400 K。Abstract: A technique of dynamic IR scene generation based on MEMS was presented. The theoretical model of IR scenes display film based on visible/infrared image film transducer was established. The MEMS technological processes of fabricating the film were introduced. The film with 512512 pixels was produced, and the pixel size of the film was 35m. Based on the IR scene generation film an IR dynamic scene generator was built. The performances of the IR dynamic scene generator were studied experimentally. The IR scenes display film based on visible/infrared image film transducer can be used in two wave bands from 3m to 5m and 8m to 12m. The spatial resolution of the IR dynamic scene generator is 14 lp/mm. In the wave band from 3m to 5m, the equivalent blackbody temperature can be from 250 K to 440 K, and in the wave band from 8m to 12m, the equivalent blackbody temperature can be from 250 K to 400 K.