Abstract: In order to improve mems-sensor application and the characteristic of parameters, the micro-nano optical fiber ring resonator structure was designed, which was a small size, low dissipation, and high quality factor. The characteristics of micro-nano optical fiber and optical transmission mode were analyzed theoretically, through the electric field of transfer matrix, the function relationships among wavelength, perimeter, effective refractive index for micro ring resonator were obtained under the acceleration effect. The results of simulation analysis show that electric field of waveguide fluctuates significantly, and coupling efficiency of waveguide is better. Spectral intensity and 3 dB bandwidth change smaller. Q value reaches 104. When mass increases 10 g, output spectrum drifts to the right about 3 nm. Acceleration and drift quantity of resonant wavelength are almost linear. Drift of resonant wavelength can be used to measure acceleration. The results can provide variety of optical waveguide devices for all-optical networks and micro-electromechanical system.