Abstract: The thermal distortions of deformable mirror with such materials as mon-crystalline silicon, silica and nucleated glass (ULE), irradiated with diod-pumped soli-state laser (DPL) were calculated and analyzed using FEA software. The results show that when the power density of input laser is 0.225 kW/cm2, and the reflectivity of the deformable mirror thin film are 99.9%, the temperature rising and thermal distortions of the deformable mirror are separately 0.804, 6.751 and 7.122℃, and 0.049 3, 0.034 8 and 0.005 4m respectivel, under the radiation time of 10 seconds. By comparison, the temperature rising of deformable mirror with mon-crystalline silicon substrate is smaller; the deformation and stress of ULE is the lowest, which would be a kind of more promising material for producing deformable mirror in future DPL laser system. In the end, some results of the long pulse laser irradiation were calculated and analysis.