Abstract: Based on the basic structural unit of SiO2/Al/SiO2, the optical constants of thin Al films were obtained accurately by fitting the multi angle ellipse polarization spectrum and the transmittance spectrum. And the influences of the thickness of Al film on the optical constants was also studied and analyzed. Theoretically, the three cavity UV induced transmission filter was obtained by using the admittance matching method. And the influence of preparation error of Al and SiO2 dielectric matching layer on the spectral properties of UV filters was systematically analyzed. Based on the low temperature, the high vacuum growth process of Al and SiO2 thin films, the high performance three cavity UV induced transmission filter were successfully prepared. The peak wavelength was located near 218 nm, and the peak transmittance was ~23.1%, and the bandwidth was ~32 nm. The transmittance in the 280 nm, 318 nm bands were about 0.5% and 0.04%, respectively. The cut-off rates of the samples were about 5.0 OD and 4.5 OD in the range of 400-700 nm and 800-1 100 nm, respectively. The results of this study have a good theoretical and practical significance for depositing the visible-near infrared band deep cut-off and UV induced transmission filters.