Abstract: As an important part of traceability chain for micro-nano geometric quantity, the grid standard template is the basic guarantee for the development of nano-technology. In order to achieve the rapid tracking and calibration of the effective area in the micro-nano grid structure, a tracking structure was designed to quickly locate the effective measurement area and orthogonally scanning direction. In order to meet the calibration requirements of different accuracy and size range, the grid standard template with multi-dimension and multi-parameter structure was designed and integrated in the same substrate. The measurement result error was analyzed and evaluated by the metrological nano measuring machine (NMM), which could characterize the traceability of grid standard template. The experimental results show that the grid standard template has good uniformity, accuracy and stability, and it is verified that the developed grid standard template can be used as an ideal reference standard for nano geometry traceability system.