Abstract: Tilting mode imaging is a method to improve the spatial resolution of images from the sampling mode, and the imaging angle of tilting mode is closely related to the image quality. This paper was focused on the analysis of the relationship between the angle of the tilting mode and the effective resolution, aliasing, blur, and noise of the tilting mode image, and determined the best imaging angle of the tilting mode superresolution imaging. Firstly, the aliasing index, field width and effective resolution of imaging angle 1-90 were simulated and analyzed, and the resolution, aliasing, blur, and noise of the image were evaluated quantitatively by the cross-restoration method. Then, the modulation transfer function (MTF) was used to restore the tilting mode image by combining the method of the reciprocal cell, and the optimum imaging angle was finally determined to be 72. Finally, the results of the analysis were verified by practical experiments, which show that the resolution of the image is increased by about 1.41 times when the angle of tilting mode imaging is 72.