Abstract: To insure that a high peak power ultraviolet laser pulse of the short pulse XeCl excimer laser system was obtained, experimental study on laser output characteristic of the compact XeCl excimer laser by pumped electron-beam form four directions was carried out. Via varieties of total pressure and component molar rate of gas mixtures in laser chamber, charge voltage of laser and thickness of titanium foil utilized as the anode, effects of them on pulse energy were showed. With the result that the optimal operation condition for the compact XeCl excimer laser by pumped electron-beam was discovered, the energy of the laser pulse of about 200 ns duration at half-amplitude exceeded 100 J under the optimal operation condition,and the electro-optical efficiency was about 5.81. In addition, the pulse jitter of the compact XeCl excimer laser was experimentally researched, and the pulse jitter was little 20 ns. Researches show that a little 20 ns pulse jitter and 103 J high energy ultraviolet laser pulse of the compact XeCl excimer laser by pumped electron-beam is obtained, and the result may be meeting demands of the short pulse XeCl excimer laser system.