利用图像翻转和复域编码的离轴干涉载频消除

Carrier removal for off-axis interferometry using image rotation and complex encoding

  • 摘要: 提出一种利用图像翻转和复域编码消除离轴干涉载频影响,进而实现相位恢复的方法。方法通过旋转样品干涉图180,得到翻转干涉图。样品干涉图与翻转干涉图首先被复数域编码为一幅合成的干涉图。继而进行傅里叶变换,可通过带通滤波器提取频谱中相互分离的共轭项用于相位恢复。通过逆傅里叶变换,可以获得含有样品干涉图和翻转干涉图的相位分布、载频信息的结果。通过除法运算,载频得以在无需复杂运算、解包裹、系统先验信息的情况下被消除。通过仿真和实验验证了算法的可行性。实验结果表明该方法可获得精确的相位恢复结果。在恢复薄相位样品时,该方法的恢复时间仅为原图像翻转方法的23.32%。

     

    Abstract: An efficient carrier removal method in off-axis interferometry to retrieve specimen phase distribution was proposed using image rotation and complex encoding. One rotated interferogram was obtained by rotating the specimen interferogram 180. The specimen interferogram and its rotated interferogram were firstly complex-encoded into a synthetic interferogram. After implementing Fourier transform, the two cross-correlation orders can be separated and then extracted by applying two band pass filters to the spectrum. The results containing phase distribution, carrier information of specimen interferogram and rotated interferogram can be obtained by implementing inverse Fourier transform. Through a division operation, carrier can be removed without complex calculation, phase unwrapping, or prior knowledge of the system. The feasibility and validity of the method were demonstrated by simulations and experiments. The obtained results show that the method can accurately retrieve specimen phase. The method consumes only 23.32% processing time of the original interferogram rotation method when retrieving thin specimen phase.

     

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