碲镉汞高工作温度红外探测器

HgCdTe high operation temperature infrared detectors

  • 摘要: 基于当前红外探测器技术的发展方向,从高工作温度红外探测器应用需求的角度分析了碲镉汞高工作温度红外探测器在组件重量、外形尺寸、功耗、环境适应性及可靠性方面的优势。总结了欧美等发达国家在碲镉汞高工作温度红外探测器研究方面的技术路线及研究现状。从器件暗电流和噪声机制的角度分析了碲镉汞光电器件在不同工作温度下的暗电流和噪声变化情况及其对器件性能的影响;总结了包括基于工艺优化的Hg空位p型n-on-p结构碲镉汞器件、基于In掺杂p-on-n结构和Au掺杂n-on-p结构的非本征掺杂碲镉汞高工作温度器件、基于nBn势垒阻挡结构的碲镉汞高工作温度器件及基于吸收层热激发载流子俄歇抑制的非平衡模式碲镉汞高工作温度器件在内的不同技术路线碲镉汞高工作温度器件的基本原理,对比分析了不同技术路线碲镉汞高工作温度器件的性能及探测器制备的技术难点。在综合分析不同技术路线高温器件性能与技术实现难度的基础上展望了碲镉汞高工作温度器件技术未来的发展方向,认为基于低浓度掺杂吸收层的全耗尽结构器件具备更好的发展潜力。

     

    Abstract: Based on the current development direction of infrared detector technology. The advantages of HgCdTe high operation temperature (HOT) infrared detector were analyzed in terms of module weight, shape size, power consumption, environmental adaptability and reliability from the perspective of application requirements of HOT infrared detector. The technical route and research status of HgCdTe HOT infrared detector in Europe and America were summarized. From the perspective of device dark current and noise mechanism, the change of dark current and noise at different operating temperatures and their effects on device performance were analyzed. The basic principles of the process optimization HgCdTe devices based on Hg vacancy n-on-p structure, extrinsic doped HgCdTe HOT devices based on in-doped p-on-n structure and Au doped n-on-p structure, nBn based HOT devices based on barrier structure and non-equilibrium mode HgCdTe HOT devices based on thermally excited carrier auger suppression in absorption layer were summarized. The performance of HgCdTe HOT devices with different technology routes and the technical difficulties in the preparation of detectors were compared and analyzed. Based on the comprehensive analysis of the performance and technical difficulties of HOT devices with different technology routes, the future development direction of HgCdTe HOT device technology was prospected. It is considered that the fully depleted device based on low concentration doping absorption layer has better development potential.

     

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