Abstract: Single-photon detection has important application prospects in quantum information, biomedicine and laser radar 3D imaging. InGaAs Geiger avalanche focal plane has single-photon sensitivity. Distance detection is achieved by measuring time of photon flight. Time-to-digital conversion accuracy determines the ranging accuracy of the detection system and this direction is the focus of single photon detection in recent years. A high resolution and low error rate 64×64 array type pixel level time-to-digital converter (TDC) circuit adopting three-stage asynchronous periodic counter structure was designed for InGaAs Geiger-mode avalanche focal plane array applications. Sub-nanosecond time resolution was realized by a voltage-controlled delay chain as well as a fine TDC that was shared by the entire array. The pixel level middle and coarse TDC used a divider counter to reduce the clock frequency and a linear feedback shift register to achieve a large time range, respectively. The high-segment coarse TDC can achieve timing, data storage and output integration through the register chain. The data conversion error rate originating from the mismatch of counting clocks between different stages was significantly reduced by incorporating of a delayed sampling scheme. A timing resolution of 0.5 ns at a reference clock frequency of 250 MHz, an integral nonlinearity of −0.4 to 0.6 LSB, a differential nonlinearity of −0.4 to 0.4 LSB, an effective digit of 13 bits, and a power consumption of 380.5 mW at 20 kHz frame rate are attained based on a 0.18 µm digital-analog hybrid CMOS technology. The TDC remains monotonous within the conversion range.