Abstract: Thermo-mechanical damage occurs when a metal film layer is irradiated by a high-power nanosecond pulse laser. High temperature and high pressure induce the thermal evaporation of the metal film layer and particles outward ejection. Most of the ejected particles are in atomic and ionic states. In the energy dispersive spectroscopy analysis test, multiple sets of standard samples for comparison experiments was used to calibrate the test results in this paper, and an estimated method was given to calculate the number of deposited atoms based on the results. The differences of the eruption of Al film under different vacuum environments and atmospheric environments irradiated by different laser fluences were compared. And the eruption and spatial distribution characteristics of metal films with different melting points were compared. The experimental results were further analyzed and explained by combining the transient images captured by pump-probe technology.