中波红外集成偏振光栅结构参数对偏振性能影响仿真分析

Simulation analysis of mid-wave infrared polarization grating performance influenced by the polarizer structural parameters

  • 摘要: 中红外集成偏振焦平面探测技术将偏振探测技术与中波红外焦平面成像探测技术融合,通过异质集成的方式实现偏振光栅和探测器的单片集成,具有体积小、质量轻,机械稳定性高等优势,可实现多偏振方向的同时成像。像元级的亚波长金属光栅可实现不同偏振方向的高消光比,然而金属材料的选择、光栅的周期、占空比、厚度等参数均会影响偏振探测器的偏振性能。给出了亚波长金属光栅的理论分析,建立了中波红外集成偏振HgCdTe探测器的偏振性能仿真模型,对不同光栅参数对探测器偏振性能影响进行了仿真分析,确定了Al光栅周期200~400 nm,占空比0.5~0.7,厚度>100 nm的参数选择。仿真分析得到在±14°入射角范围内,偏振消光比变化较小。同时,引入了Si基HgCdTe探测器,仿真分析了SiO2增透膜厚度对偏振消光比的影响,确定了SiO2最佳厚度在500 nm附近,对Si基和CdZnTe衬底集成偏振HgCdTe探测器的消光比进行比对,得出了Si基探测器偏振性能更优。仿真结果可为中波红外集成偏振HgCdTe探测器偏振光栅的设计提供理论指导和参考。

     

    Abstract: Mid-infrared integrated polarization focal plane detection technology, which combines polarization detection technology and mid-wave infrared focal plane imaging detection technology, has realized the monolithic integration of polarization grating and detector through heterogeneous integration, and has the advantages of small size, light weight, high mechanical stability and simultaneous imaging of multiple polarization directions. Pixel-level sub-wavelength metal gratings can achieve high extinction ratios in different polarization directions. However, the selection of metal material and the structural parameters of gratings such as pitch, duty cycle and thickness have a significant impact on the polarization performance. The theoretical analysis of the sub-wavelength metal grating was given, and the polarization performance simulation model of the mid-wave infrared integrated polarized HgCdTe detector was established, and the effects of different grating parameters on the polarization performance were analyzed. The optimal structural parameters of 200-400 nm Al grating pitch, 0.5-0.7 duty cycle, and over 100 nm thickness were determined by simulation. The simulation results show that the range of ±14° incident angle had a small effect on the polarization extinction ratio. Meanwhile, Si-based HgCdTe detector had been introduced. The influence of SiO2 antireflection film thickness on polarization extinction ratio had been simulated to determine the optimal thickness. Compared with Cadmium Zinc Telluride (CdZnTe) substrated polarization HgCdTe detectors, the polarization performance of Si-based detector has been proved better. The simulation results can provide theoretical guidance and reference for the design of the polarization grating of the mid-wave infrared integrated polarization HgCdTe detector.

     

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