基于图像的激光微尺度烧蚀质量估算方法

Estimation method of laser micro-scale ablation quality based on image

  • 摘要: 激光微尺度烧蚀下的烧蚀质量是激光微推进系统中评估比冲等性能参数的重要物理量,文中在利用扫描电镜得到的烧蚀坑图像的基础上,基于灰度表面重构形貌方法,建立了微尺度烧蚀坑形貌三维模型重构算法;针对图像噪声影响,对图像进行分段平滑,有效地解决了量化误差和灰度模糊对重构形貌的影响,实现了烧蚀坑体积估算。结果表明:所提出的方法能够快速有效地重构激光微尺度烧蚀下烧蚀坑形貌的三维形状,进而计算其烧蚀质量。

     

    Abstract: The ablation quality under laser micro-scale ablation is an important physical quantity for evaluating performance parameters such as specific impulse in the laser micro-propulsion system. Based on the ablation pit image obtained by the scanning electron microscope, a micro-scale ablation pit shape three-dimensional model reconstruction algorithm was established based on the gray-scale surface reconstruction method; In view of the effect of image noise, the image was segmented and smoothed, which effectively solved the effect of quantization error and grayscale blur on the reconstructed shape, and realizeing the ablation pit volume estimation. The results show that the proposed method can quickly and effectively reconstruct the three-dimensional shape of ablation pits under laser micro-scale ablation, and then calculate the ablation quality.

     

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