Abstract: In order to meet the requirements of high-precision Noise Equivalent Spectral Radiance calibration of infrared remote sensors, the development and manufacturing process of the infrared integrating sphere radiation source were improved on the basis of the original design to meet the vacuum cryogenic use requirements. The integrating sphere radiation source used 8 sets of carbon fiber quartz electric heating tubes as the infrared radiation medium to achieve a working band coverage of 3-15 μm, and the adjustable radiation dynamic range was doubled. The radiation calibration reflective light path was designed, and the standard cavity blackbody radiation source was compared and measured to realize the radiation calibration of the infrared integrating sphere radiation source under vacuum and low temperature conditions. The calibration results show that the uniformity of the surface within the normal Ф200 mm of the infrared integrating sphere radiation source is 99.75%, the angular uniformity within ±10° is 99.81%, and the instability is 0.05%. It is the realization of the infrared integrating sphere radiation source spectral radiance output and color temperature near-linear adjustable function, 5 μm and 10 μm radiance adjustable range are up to 12.8 and 1.6 μW/(cm²·sr·nm).