胡玮娜, 吕勇, 耿蕊, 李宇海, 牛春晖. 光电探测器表面损伤状态偏振成像式探测系统[J]. 红外与激光工程, 2022, 51(6): 20210629. DOI: 10.3788/IRLA20210629
引用本文: 胡玮娜, 吕勇, 耿蕊, 李宇海, 牛春晖. 光电探测器表面损伤状态偏振成像式探测系统[J]. 红外与激光工程, 2022, 51(6): 20210629. DOI: 10.3788/IRLA20210629
Hu Weina, Lv Yong, Geng Rui, Li Yuhai, Niu Chunhui. Photoelectric detector surface damage state polarization imaging type detection system[J]. Infrared and Laser Engineering, 2022, 51(6): 20210629. DOI: 10.3788/IRLA20210629
Citation: Hu Weina, Lv Yong, Geng Rui, Li Yuhai, Niu Chunhui. Photoelectric detector surface damage state polarization imaging type detection system[J]. Infrared and Laser Engineering, 2022, 51(6): 20210629. DOI: 10.3788/IRLA20210629

光电探测器表面损伤状态偏振成像式探测系统

Photoelectric detector surface damage state polarization imaging type detection system

  • 摘要: 针对在外场实现探测器损伤状态实时探测的需求,研发了光电探测器表面损伤状态偏振成像式探测系统。理论推导了“猫眼”目标回波偏振特性参数DP和回波偏振度DOP的表达式,利用MATLAB软件仿真绘制了表面粗糙度、回波偏振度以及偏振特性的关系曲线;设计了一套同时偏振成像光学系统,开展了671 nm连续激光对电荷耦合器件(CCD)表面损伤状态的实时探测外场实验,编制了基于MATLAB GUI的回波图像可视化实时采集系统,得到了回波图像强度、偏振特性以及光斑尺寸等信息;通过光学显微镜和白光干涉仪对探测器表面损伤处和未损伤处形貌图像分析,发现探测器损伤表面可见硅基底且粗糙度参数Sq值较大;结果表明,仿真结果与实验测试结果具有良好一致性。光电探测器被损伤后,其表面粗糙度增大,回波偏振特性参数DP减小,退偏特性明显,偏振度DOP减小。偏振成像技术可有效对光电探测器表面损伤状态进行实时探测,该研究提供了一种外场条件下实时探测的好方法。

     

    Abstract: In order to achieve the demand of real-time detector damage detection in the external field, a photoelectric detector surface damage state polarization imaging type detection system was developed. The expressions of the cat eye target echo polarization characteristics (DP) and the degree of polarization (DOP) were derived theoretically, the relationship curves among surface roughness, DOP and DP were simulated by MATLAB software. A simultaneous polarization imaging optical system was designed, a real-time detection outfield experiment of the Charge Coupled Devices (CCD) surface damage state by a 671 nm continuous laser was carried out and a MATLAB GUI-based echo image visualization real-time acquisition system was developed to obtain information such as echo image intensity, DP and spot size. Moreover, by analyzing the morphological images of the damaged and undamaged detector surface with optical digital microscope and white-light interferometer, it was found that the silicon substrate was visible on detector damage surface and the roughness parameter Sq was large. Clearly, the simulation results are in good agreement with the experimental test results. The results show that after the photodetector is damaged, its surface roughness increases, DP decreases, the depolarization characteristic is obvious and DOP decreases. Overall, the polarization imaging technique can effectively detect the damage state of the photodetector surface in real time, and this study provides a good method for real-time detection under external field conditions.

     

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