底发射VCSEL片上点阵结构光投影装置设计

Design of on-chip dot array structured light projector using bottom-emitting VCSEL

  • 摘要: 为解决现有点阵结构光投影装置中准直透镜会导致较强的零级衍射而造成投影点阵光强分布不均匀的问题,提出了一种基于底发射垂直腔面发射激光器的片上点阵光投影装置结构,并给出了衍射光学元件设计思路。首先对目标光场进行光强调整和坐标变换,在无准直透镜情况下利用基于瑞利-索末菲衍射积分的Gerchberg-Saxton改进算法获得片上衍射光学元件的相位分布,并最终对该点阵投影装置的投影效果进行评估。结果表明:在衍射光学元件设计过程中采用高斯光束作为光源时,该结构能更好地抑制零级衍射,获得光强分布更加均匀的投影点阵。此外,该结构不仅可省去透镜的安装,减小投影装置尺寸,还可通过流片工艺实现光源和衍射光学元件一体化集成。

     

    Abstract: To solve the problem that the collimating lens in the existing dot array structured light projector will result in dramatical zero-order diffraction and uneven intensity distribution of the projected dot, an on-chip dot array structured light projector based on bottom-emitting vertical-cavity surface-emitting laser was proposed as well as the design of the corresponding diffractive optical element. In the design, the target intensity distribution was firstly modified with intensity adjustment and coordinate transformation. Then, the improved Gerchberg-Saxton algorithm based on the Rayleigh-Sommerfeld diffraction integral was applied to obtain the phase distribution of the on-chip diffractive optical element of the projector without collimating lens. Eventually, evaluations of the projected dot was conducted. Simulation results show that the projector can suppress the zero-order diffraction better and obtain more uniformly-distributed intensity when the gaussian beam is used as the light source. In addition, the structure can omit the installation of the collimating lens, thus, reducing the size of the projector and realizing the integration of the light source and the diffractive optical element through chip manufacturing process.

     

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