李子杨, 刘华松, 孙鹏, 杨霄, 白金林, 徐颖, 杨仕琪, 季一勤, 苏建忠. 激光/长波红外双谱段减反射薄膜设计与制备[J]. 红外与激光工程, 2022, 51(3): 20210944. DOI: 10.3788/IRLA20210944
引用本文: 李子杨, 刘华松, 孙鹏, 杨霄, 白金林, 徐颖, 杨仕琪, 季一勤, 苏建忠. 激光/长波红外双谱段减反射薄膜设计与制备[J]. 红外与激光工程, 2022, 51(3): 20210944. DOI: 10.3788/IRLA20210944
Li Ziyang, Liu Huasong, Sun Peng, Yang Xiao, Bai Jinlin, Xu Ying, Yang Shiqi, Ji Yiqin, Su Jianzhong. Design and preparation of laser/long-wave infrared dual-band antireflection thin-film[J]. Infrared and Laser Engineering, 2022, 51(3): 20210944. DOI: 10.3788/IRLA20210944
Citation: Li Ziyang, Liu Huasong, Sun Peng, Yang Xiao, Bai Jinlin, Xu Ying, Yang Shiqi, Ji Yiqin, Su Jianzhong. Design and preparation of laser/long-wave infrared dual-band antireflection thin-film[J]. Infrared and Laser Engineering, 2022, 51(3): 20210944. DOI: 10.3788/IRLA20210944

激光/长波红外双谱段减反射薄膜设计与制备

Design and preparation of laser/long-wave infrared dual-band antireflection thin-film

  • 摘要: 在氟化钡光学元件上设计并制备多谱段减反射薄膜是提升光电系统探测性能的关键。在氟化钡基底上设计并制备了1064 nm激光/长波红外双谱段减反射薄膜。基于周期对称结构膜系导纳计算方法,以及拟合膜层周期数与参考波长的优化算法,开展了复合谱段减反射薄膜初始膜系的设计方法研究。使用热蒸发离子束辅助沉积方法制备了多层减反射薄膜。测试结果表明,该薄膜在1064 nm处透射率为94.0%,在8~12 μm长波红外谱段平均透射率为96.3%,在8.2 μm处的透射率高达99.4%。该激光/长波红外双谱段减反射薄膜具有良好的光学性能,可以应用于多模复合精确探测光电装备之中,对于提升探测系统的工作性能具有重大意义。

     

    Abstract: The design and preparation of multi-band antireflection thin-film on barium fluoride optical elements is the key to improve the detection performance of photoelectric system. 1064 nm laser/long-wave infrared dual-band antireflection thin-film was designed and prepared on barium fluoride substrate. Based on the calculation method of the admittance in periodically symmetric structure thin-film system and the optimization algorithm of fitting periods and reference wavelength, study on the design method of the initial film system of the multi-band antireflection thin-film was carried out. The films were prepared using the thermal evaporation ion-assisted deposition method. The results show that the film has excellent optical properties with a transmittance of 94.0% at 1064 nm, average transmittance of 96.3% in the long-wave infrared spectral band from 8 to 12 μm, and transmittance of 99.4% at 8.2 μm. The laser/long-wave infrared dual-band antireflection thin-film can be applied to dual-mode composite photodetection optoelectronic equipment, which is of great significance to improve the working performance of the photodetection system.

     

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