表面等离激元纳米结构增效的光电探测器进展(特邀)

Progress of surface plasmon nanostructure enhanced photodetector (Invited)

  • 摘要: 光电探测器作为航空航天、深空探测和环境监测等领域的核心器件之一,具有重要的科学研究和实用价值。表面等离激元具有可突破光学衍射极限、实现纳米聚焦的性质,为光电探测器的性能提升提供了全新的技术手段,是近年来光电探测增效研究领域的热点之一。文中围绕表面等离激元纳米结构增效的光电探测器研究展开综述,首先介绍了各类表面等离激元纳米结构的物理特性,主要包括局域表面等离激元结构和传导型的表面等离极化激元结构,以及由表面等离激元金属和半导体材料构成的异质结构;然后重点从探测器性能、探测原理和工艺方法等角度,介绍了等离激元纳米结构增强的光电探测器的研究进展;最后对表面等离激元纳米结构增效的光电探测器及其在未来面临的挑战进行了总结和展望。

     

    Abstract: As one of the core devices in the field of aeronautic and astronautics, deep space exploration, environmental monitoring, there is significant scientific research and practical application value for photodetector. In recent years, surface plasmon has become one of the research hotspots in the field of enhanced photodetection, due to the properties of breaking through the optical diffraction limit and realizing nanometer focusing. Hence, surface plasmon is a novel technical method for improving the performance of photodetectors. In this article, the research progress based on the photodetector with enhancement effect was reviewed, the enhancement effect can attribute to the surface plasmon nanostructure. Firstly, various kinds of physical properties of surface plasmon nanostructures were introduced, mainly included localized surface plasmon structure and surface plasmon polaritons structure with propagating nature, as well as the heterostructure that consisted of surface plasmon metal and semiconductor materials. Then, the research progress of photodetector enhanced by surface plasmon nanostructures was introduced focusing on the aspects of performance of photodetector, detection mechanism and fabrication process method. Finally, the photodetector enhanced by surface plasmon nanostructures and the related challenges in the future were both summarized and prospected.

     

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