Abstract: Content integrated, broadband, large group delay devices have important applications in microwave photonic filtering, true delay phased array antenna and other fields, which can effectively reduce the system size and power consumption. In this paper, a broadband large dispersion delay chip based on silicon-based photonic integration was proposed and implemented. By using ultra-low loss waveguide structure and side wall normal vector modulation structure, on-chip integration of large dispersion waveguide grating was realized. The dispersion was about 250 ps/nm, maximum group delay was 2440 ps and the bandwidth was more than 9.4 nm. The chip is expected to be used in microwave photonics, high-speed fiber communication system and other fields.