李锦, 王丕屿, 王正瑜, 牛睿, 万帅, 郭光灿, 董春华. 氮化硅微腔中的光学频率梳(特邀)[J]. 红外与激光工程, 2022, 51(5): 20220302. DOI: 10.3788/IRLA20220302
引用本文: 李锦, 王丕屿, 王正瑜, 牛睿, 万帅, 郭光灿, 董春华. 氮化硅微腔中的光学频率梳(特邀)[J]. 红外与激光工程, 2022, 51(5): 20220302. DOI: 10.3788/IRLA20220302
Li Jin, Wang Piyu, Wang Zhengyu, Niu Rui, Wan Shuai, Guo Guangcan, Dong Chunhua. Optical frequency comb in silicon nitride microresonator(Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220302. DOI: 10.3788/IRLA20220302
Citation: Li Jin, Wang Piyu, Wang Zhengyu, Niu Rui, Wan Shuai, Guo Guangcan, Dong Chunhua. Optical frequency comb in silicon nitride microresonator(Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220302. DOI: 10.3788/IRLA20220302

氮化硅微腔中的光学频率梳(特邀)

Optical frequency comb in silicon nitride microresonator(Invited)

  • 摘要: 具有高品质因子(Q 值)的光学谐振腔能够长时间将光束缚在较小的模式体积内,极大地增强了光与物质的相互作用,成为集成光学器件中具有重大潜力的重要组成部分。聚焦于目前广泛应用于集成非线性光学领域的氮化硅材料平台,为了解决大尺寸氮化硅微环腔由拼接误差、表面粗糙等因素导致的散射损耗较大的问题,进行了一系列的工艺改进以提高大尺寸氮化硅微环腔的品质因子。结果表明:通过薄膜再沉积工艺可以有效降低氮化硅波导的散射损耗,半径为560 μm的大尺寸氮化硅微环腔的本征Q值得到了平均26% 的提升。得益于提高的微腔Q 值,在氮化硅微环腔中实现了重复频率40 GHz 的光学频率梳。

     

    Abstract: Optical resonators with high quality (Q) factor can restrict light in a small mode volume for a long time, greatly enhancing the interaction between light and matter, and becoming an important component with great potential in integrated optical devices. Focusing on the silicon nitride material platform, which is currently widely used in the field of integrated nonlinear optics, in order to solve the problem of large scattering loss in the large size on-chip silicon nitride microring resonator caused by the stitching error, the surface roughness and other factors, a series of fabrication process improvements were made to improve the quality factor of the large size silicon nitride microring resonator. The results show that the scattering loss of the silicon nitride waveguide can be effectively reduced by thin film redeposition process, and the intrinsic Q of the large size silicon nitride microring resonator with a radius of 560 μm is increased by 26% on average. Thanks to the improved Q of the large size microring resonator, the frequency comb with the repetition rate of 40 GHz is realized in the on-chip silicon nitride microring resonator.

     

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